Imaging system for realizing multiple energy point spectrum resolution on extreme ultraviolet band and application of imaging system

Abstract

The invention relates to an imaging system for realizing multiple energy point spectrum resolution on the extreme ultraviolet band and an application of the imaging system. The imaging system comprises a plurality of main mirrors and an auxiliary mirror; all the main mirrors are arranged in a circle; the auxiliary mirror is arranged on an axis of the circle; one channel is formed by combination of each main mirror and the auxiliary mirror; and one image is formed in each channel for the same object. Light emitted from the object is reflected via each main mirror, then is irradiated to the auxiliary mirror, and finally is reflected by the auxiliary mirror to form a plurality of images with a number as the same as the number of the main mirrors. The imaging system is applied to imaging of plasma of a Z-pinch device; plasma images, of ultraviolet band, with multiple energy point and high spectrum resolution can be acquired in one-step imaging; and research on an evolutionary process of the plasma at different temperatures along with time is facilitated. Compared with the prior art, the imaging system has the advantages of multiple energy point imaging, high light concentrated efficiency, high spectrum resolution and the like.

Description

technical field [0001] The invention relates to the field of extreme ultraviolet imaging, in particular to an imaging system for realizing spectral resolution of multi-energy points in the extreme ultraviolet band and an application thereof. Background technique [0002] The high-power Z-pinch device can generate strong X-ray pulses, and has important application prospects in the research of radiation characteristics of materials and devices, controllable fusion and nanolithography. Imaging systems with spectrally selective capabilities can capture the radiation profile of plasmas at specific temperatures. At present, the commonly used imaging equipment at home and abroad in Z-pinch device plasma diagnosis includes: pinhole camera, grazing incidence imaging system and normal incidence imaging system. The pinhole camera is based on the principle of "small hole imaging". The Z-pinch target is imaged on the image plane after passing through a pinhole with a diameter of about t...

AI Technical Summary

Problems solved by technology

However, the spectral resolution of the pinhole camera is achieved by the filter placed in front of the detector. For the pinhole itself, it has no spectral selection ability, that is, the pinhole passes through any wavelength of light and cannot be selected. Imaging specific wavelengths of light

After combining the filter, the light with a certain wavelength can be selected, but the filter can pass light in a wide range of wavelengths. For example, if the filter of A1 material is used, it can filter out visible light, but from 17.2nm to close to 80nm light can pass through the filter, so the spectral selection ability is weak

Another shortcoming of the pinhole camera is that the light collection efficiency (the ability to collect light) is too low, about 10 -9

None of the three imaging systems described above can meet the diagnostic requirements

Images