Piezoelectric array ultrasonic transducer
An ultrasonic transducer and piezoelectric technology, applied in the direction of fluid using vibration, can solve the problems of difficult packaging, narrow bandwidth, poor stability and comprehensive performance, and achieve good integrity, convenient packaging, and improved sensitivity. Effect
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[0012] In this implementation mode, an ultrasonic transducer using AlN (aluminum nitride) piezoelectric thin film, the number of array elements is 2×2, two of which are 1.25MHz array elements and two of which are 2.9MHz array elements: the base 7 adopt (length×width×thickness) 10×10×0.25mm single crystal silicon, each vibrating cavity 8 set on it is (length×width×thick) 0.18×0.18×0.25mm, and the vibrating cavity 8 on it is (length×width×thickness) 0.18×0.18×0.25mm (2.9MHz array element) and 0.21×0.21×0.25mm (1.25MHz array element); the support layer 6 is made of silicon dioxide, its thickness is 350nm, and the length and width are equal The same as the substrate 7; the lower electrode 5 has the same horizontal length as the substrate, a longitudinal width of 7mm, and a thickness of 280nm, made of platinum-titanium alloy, magnetron sputtered on the silicon dioxide support layer 6, and the line corresponding to the lead-out line of the upper electrode The width of the shaped gap...
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