Spatial phase shift lateral shearing interferometer

A transverse shearing and interferometer technology, applied in the field of optical measurement, can solve the problem of high requirements for electric control, and achieve the effects of simple operation, elimination of environmental vibration and simple structure

Inactive Publication Date: 2013-08-21
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

However, this method needs to precisely control the moving distance of the optical wedge to obtain the required phase shift amount, which requires high requirements for electric control

Method used

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  • Spatial phase shift lateral shearing interferometer
  • Spatial phase shift lateral shearing interferometer
  • Spatial phase shift lateral shearing interferometer

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0022] see first figure 1 , figure 1 It is the optical path structure diagram of the spatial phase-shifting shearing interferometer of the present invention. Depend on figure 1 It can be seen that the spatial phase-shifting transverse shearing interferometer of the present invention consists of a measured wavefront 1, a polarization beam splitting shearing plate 2, a polarization phase shifter 3, a first image sensor 4, a second image sensor 5, a third image sensor 6 and a computer 7 components, the positional relationship of the above components is as follows:

[0023] The polarizing beam splitting shearing plate 2 is an optical parallel plate, the front surface 2a is coated with a polarizing beam splitting film, and the rear surface 2b is coated with a total reflection...

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Abstract

The invention relates to a spatial phase shift lateral shearing interferometer which is characterized in that the interferometer is composed of a polarization light splitting shearing plate, a polarization phase shift device, a first image sensor, a second image sensor, a third image sensor and a computer. According to the spatial phase shift lateral shearing interferometer, polarization shearing interference is introduced to achieve spatial phase shift, influences caused by environmental vibration are eliminated and the spatial phase shift lateral shearing interferometer has the advantages of being simple and compact in structure, easy and convenient to operate and the like.

Description

technical field [0001] The invention relates to optical measurement, in particular to a spatial phase-shifting transverse shear interferometer. Background technique [0002] Interferometry has the advantages of non-contact, high precision, and high spatial resolution, and has been widely used in optical testing, microelectronics manufacturing, and precision machining. As an important branch of interferometry technology, transverse shear interferometry uses the interference between the measured wavefront and the wavefront copied by transverse shear, without the need for a standard reference plane, and its structure is simple, compact, and stable, and it is a very effective wavefront detection method. The phase-shifting method is introduced into the shear interferometry, forming a phase-shift shear interferometry technique, which can further improve the accuracy and spatial resolution of the shear interferometric wavefront measurement. [0003] The prior art [1] (Devon W.Gri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02G02B27/28
Inventor 曾爱军刘蕾朱玲琳黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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