Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products

A technology of blazed grating and blaze angle, applied in diffraction grating, opto-mechanical equipment, photoengraving process of patterned surface, etc., can solve problems such as difficulty in precision, and achieve the effect of improving quality, low cost and high etching accuracy

Inactive Publication Date: 2013-08-21
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, because the holographic ion beam etching method is also based on the holographic interference exposure stripes to prepare t

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  • Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products
  • Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products
  • Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products

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[0044]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0045] see Figure 5 , preparation method of the present invention, comprises the following steps:

[0046] (1) Preparation of soft and hard templates, substrate cleaning and embossing adhesive spin coating steps:

[0047] figure 1 is a schematic diagram used to show the preparation of soft templates. First, according to the target grating pattern of the specified period and depth, the hard template is prepared by electron beam exposure technology, and then the hard template is prepared by using such as figure 1 The process shown transfers the grating pattern on the hard template to the soft tem...

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Abstract

The invention discloses a preparation method of a blazing-angle-variable blazed grating and a double-blazed grating and products, and belongs to the technical field of image impressing. According to the preparation method of the blazing-angle-variable blazed grating and the double-blazed grating, a target grating image on a hard template is transferred to a soft template, and an impressing rubber layer is prepared on a base sheet; the target grating image on the soft template is impressed on the impressing rubber layer, the inclination of the soft template is controlled through the intensity of pressure to further control a blazing angle of a primary blazed grating, and the primary blazed grating is further obtained in an etching mode; a hard mask layer is deposited on the primary blazed grating; an impressing rubber layer is prepared on the hard mask layer; the target blazed grating image on the soft template is impressed on the impressing rubber layer, the inclination of the soft template is controlled through intensity of pressure to further control a blazing angle of a secondary blazed grating, the secondary blazed grating is obtained in an etching mode, and the double-blazed grating is prepared. According to the preparation method of the blazing-angle-variable blazed grating and the double-blazed grating and products, the pressure is controlled when the image on the soft template is transferred to the base sheet, the blazed grating having different blazing angles is obtained, the quality of the blazed grating is guaranteed, and meanwhile cost is lowered.

Description

technical field [0001] The invention belongs to the technical field of image embossing, and more specifically relates to a preparation method and product of a blazed grating with a variable blaze angle and a double blazed grating. Background technique [0002] As a widely used dispersive optical component, the grating works on the principle of multi-slit diffraction. The higher the order of the spectrum, the greater the resolving power and dispersion power. However, the distribution of light intensity is that the lower the order, the greater the light intensity. Especially for the zero order without dispersion, it occupies a large part of the total energy, which is very unfavorable for the application of the grating. To overcome this shortcoming, researchers invented blazed gratings. The blazed grating is a flat reflective grating, and its groove surface is not parallel to the grating surface, and there is an angle between them. It can produce a flare in a specified dire...

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Application Information

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IPC IPC(8): G02B5/18G03F7/00
Inventor 陈鑫赵建宜王磊周宁刘文
Owner HUAZHONG UNIV OF SCI & TECH
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