Preparation method of blazing-angle-variable blazed grating and double-blazed grating and products
A technology of blazed grating and blaze angle, applied in diffraction grating, opto-mechanical equipment, photoengraving process of patterned surface, etc., can solve problems such as difficulty in precision, and achieve the effect of improving quality, low cost and high etching accuracy
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[0044]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0045] see Figure 5 , preparation method of the present invention, comprises the following steps:
[0046] (1) Preparation of soft and hard templates, substrate cleaning and embossing adhesive spin coating steps:
[0047] figure 1 is a schematic diagram used to show the preparation of soft templates. First, according to the target grating pattern of the specified period and depth, the hard template is prepared by electron beam exposure technology, and then the hard template is prepared by using such as figure 1 The process shown transfers the grating pattern on the hard template to the soft tem...
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