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Micro-nano-scale material seebeck coefficient online measurement method

A Seebeck coefficient and measurement method technology, which is applied in the field of thermoelectric performance testing of micro-nano thermoelectric conversion materials, can solve the problems of increasing the complexity of the preparation process and increasing measurement errors, and achieve stable test parameter values, convenient production, and simple and reliable calculations. Effect

Inactive Publication Date: 2013-08-28
JIANGSU R & D CENTER FOR INTERNET OF THINGS
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Problems solved by technology

These test methods all need to install a micro-heater or radiation heating device at one end of the sample to realize the temperature difference, and need to add a thermocouple or a temperature-measuring element obtained by micro-processing in the temperature test. On the one hand, it increases the complexity of the preparation process. On the other hand, aspect will inevitably increase the measurement error

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0025] Such as figure 1 Shown:

[0026] The measurement structure of this method includes a silicon substrate, a heating resistor 2, a CMOS temperature measurement circuit, and a thermopile 1. In this embodiment, the thermopile 1 includes three pairs of thermocouples arranged in parallel and connected in series. Using multiple pairs of thermocouples can reduce measurement errors. The heating resistor 2 is used to heat the hot end of the thermopile 1, and the CMOS temperature measurement circuit is used to measure the absolute temperature of the hot and cold end of the thermopile 1 online. The thermocouple, heating resistor 2 and CMOS temperature measurement circuit are all located on the silicon substrate.

[0027] Each pair of thermocouples includes thermocouple strips 1-1 and thermocouple strips 1-2 of different micro-nano materials. The materials of the tw...

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Abstract

The invention provides a micro-nano-scale material seebeck coefficient online measurement method, which comprises: heating a heat end of a measured thermopile; measuring an open circuit voltage Vout output by the measured thermopile when the measured thermopile achieves a heat stable state; adopting a CMOS temperature measurement circuit arranged on the heat end of the measured thermopile to carry out online measurement of an absolute temperature T2 of the heat end of the measured thermopile, adopting the CMOS temperature measurement circuit output 1 of the heat end to represent a voltage VT2 of the absolute temperature T2, and measuring the VT2 value; adopting another CMOS temperature measurement circuit arranged on a cold end of the measured thermopile to carry out online measurement of an absolute temperature T1 of the cold end of the measured thermopile, adopting the CMOS temperature measurement circuit output 1 of the cold end to represent a voltage VT1 of the absolute temperature T1, and measuring the VT1 value; and calculating a seebeck coefficient S of the measured thermopile, wherein the S meets the following formula: S=Vout / [n(VT2-VT1)]. The method has characteristics of stable test parameter value, and simple and reliable calculation.

Description

technical field [0001] The invention relates to the technical field of thermoelectric performance testing of micro-nano thermoelectric conversion materials, in particular to an online measurement method for the Seebeck coefficient of micro-nano scale materials. Background technique [0002] MEMS infrared detector based on thermoelectric effect (Seebeck effect)----MEMS thermopile infrared detector is a typical device in the field of sensing and detection, which can be used to form temperature sensors, gas sensors, human body sensing systems, Anti-theft alarm device, etc. Compared with infrared detectors based on other working principles (such as pyroelectric infrared detectors and thermistor infrared detectors, etc.), thermopile infrared detectors have measurable constant radiation, no need to add bias voltage, no need to chop oscilloscope, more suitable for mobile applications and field applications and other obvious comprehensive advantages. Therefore, MEMS thermopile inf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N25/20
Inventor 孟如男王玮冰
Owner JIANGSU R & D CENTER FOR INTERNET OF THINGS
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