Air-flotation ultra-precision grinding device and grinding method thereof

Abstract

The invention discloses an air-flotation ultra-precision grinding device and a grinding method thereof. The air-flotation ultra-precision grinding device comprises a disc, tool bars, diamond pellets, and an air cavity. The disc is in a circular structure. The disc is provided with a plurality of layers of circularly arranged cavity holes centered on the circle center of the disc, and the air cavity, wherein the cavity holes are used for fitting the tool bars equal in diameter and the air cavity is used for communicating compressed air. The tool bars are arranged in the cavity holes. The diamond pellets equal in diameter are bonded to the front ends of the tool bars. The tail end of each tool bar is mounted in the cavity hole and communicated with the air cavity to form a piston end, the piston ends of the tool bars are communicated through the air cavity, and the diamond pellets can float up and down in the cavity holes of the tool bars. The diamond pellets on an air-floating pellet grinder can float up and down in a micro form so that constant pressure machining is achieved, and ultra-deep cut marks and cracks are avoided.

Description

technical field [0001] The invention relates to an air-floating ultra-precision grinding processing device and a processing method thereof. Background technique [0002] With the development of modern science and technology, based on the excellent performance of brittle materials, it has been widely used in many fields of modern high-tech industries. Devices using brittle materials have high requirements for surface quality and precision, so they require ultra-precision machining. Ultra-precision machining of brittle materials is usually a grinding and polishing process. Grinding processing often uses fixed abrasive processing of diamond pellets. It has high removal rate, high processing precision, and can effectively reduce the surface roughness of the workpiece. However, in the process of processing, due to the uneven wear of the diamond pellets, some pellets cause excessive stress on the surface of the workpiece, forming too deep cut marks and cracks. These deep cuts ...

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the shortcomings of the existing grinding process using fixed abrasives such as diamond pellets, which require regular dressing of the abrasive tool and low processing efficiency, the present invention provides a low-cost, high-efficiency, precise, and less-free grinding machine that is not only suitable for brittle materials. The processing of damage is also applicable to the processing device and processing method of air-floating ultra-precision grinding of plastic metal materials

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