Integrated device for preparing organic film device on flexible substrate

Abstract

The invention relates to an integrated device for preparing an organic film device on a flexible substrate. The integrated device comprises a driving control unit, a glove box (1) for preparation and machining work and an evaporation chamber (3) for vacuum heat evaporation work, wherein the evaporation chamber is internally provided with an evaporation roller (31) for fixedly installing the flexible substrate; the device further comprises a transition cabin (2) arranged between the evaporation chamber and the glove box; the evaporation chamber, the transition cabin and the glove box can be communicated with one another to form a totally enclosed environment isolated from the external world, and a transfer mechanism is arranged inside the totally enclosed environment; a glove (21) is arranged on the outer wall of the transition cabin. The evaporation roller can be separated from a sample trolley and is connected with the transfer mechanism by operating the glove, and the purpose of transferring the evaporation roller and a large-area flexible sample attached to the evaporation roller between the evaporation chamber and the glove box is achieved under the effect of the driving control unit.

Description

technical field [0001] The invention belongs to the field of preparation of organic thin film devices, and in particular relates to an integrated device for preparation of organic thin film devices on a flexible substrate. Background technique [0002] Organic semiconductor thin film materials are a new class of semiconductor materials that are different from traditional silicon-based and III-V compound semiconductors. They use the ordered arrangement of small organic molecules or polymers with conjugated π bond structures to form a semiconductor conductive layer, which can be prepared into flexible optoelectronic devices, and is expected to be practically applied in the fields of organic display drive circuits, organic sensors, memories, organic solar cells, e-books or e-paper, and radio frequency identification tags. [0003] In the prior art, when using organic small molecule materials to prepare organic semiconductor thin films, the method of heating and sublimating the ...

AI Technical Summary

Problems solved by technology

However, the existing thermal evaporation equipment in the evaporation chamber and the measurement and characterization equipment in the glove box are independent devices. When the organic film is deposited in the glove box for preparation and processing, it is difficult to avoid exposure to air or moisture. , cannot completely isolate water and oxygen, and the equipment is very expensive

Images