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Cryopump system, and method of operating the same, and compressor unit

A low-temperature pump system and low-temperature pump technology, applied in the field of compressor units, can solve problems such as high operating pressure

Active Publication Date: 2013-09-18
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, when the working gas temperature is higher, the operating pressure is more likely to reach its high pressure set point

Method used

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  • Cryopump system, and method of operating the same, and compressor unit
  • Cryopump system, and method of operating the same, and compressor unit
  • Cryopump system, and method of operating the same, and compressor unit

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Embodiment Construction

[0034] figure 1 It is a diagram schematically showing the overall configuration of a cryopump system 100 according to an embodiment of the present invention. The cryopump system 100 is used to evacuate the vacuum chamber 102 . The vacuum chamber 102 is provided to provide a vacuum environment to a vacuum processing device (for example, a device used in a semiconductor manufacturing process such as an ion implantation device or a sputtering device).

[0035] The cryopump system 100 includes one or more cryopumps 10 . The cryopump 10 is installed in the vacuum chamber 102, and is used to increase the degree of vacuum inside it to a desired level.

[0036] The cryopump 10 includes a refrigerator 12 . The refrigerator 12 is, for example, an ultra-low temperature refrigerator such as a Gifford-McMahon refrigerator (so-called GM refrigerator). The refrigerator 12 is a two-stage refrigerator including a first cooling stage 14 and a second cooling stage 16 .

[0037] The refriger...

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Abstract

A cryopump system (100) includes a cryopump (10) configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit (50) of a working gas for the cryopump (10), a gas line (72) connecting the cryopump (10) and the compressor unit (50), a gas volume adjuster (74) configured to increase a quantity of the working gas in the gas line (72) during the vacuum pumping operation in comparison with that during the preparatory operation, and a control device (110) configured to control the compressor unit (50) so as to provide a pressure control for the gas line (72).

Description

technical field [0001] The invention relates to a cryopump system, its operation method and a compressor unit suitable for the cryopump system. Background technique [0002] There is known a refrigeration system including a cryogenic refrigerator and a compressor for supplying compressed gas to the refrigerator. The static charge pressure of the gas circuit of the compressor is reduced by the flow of gas into the buffer volume when the cooling performance is allowed to decrease. If high power refrigeration is required again, the static charge pressure is restored by venting gas from the buffer volume. Only the static charging pressure changes, and the compressor operates at a constant speed. In this way, the power consumption when the cooling performance is allowed to decrease is also reduced. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2009-150645 [0004] Cryopumps operate over a relatively wide temperature range. Cool to ultra-low temperatures for vacuu...

Claims

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Application Information

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IPC IPC(8): F04B37/08F04B49/00
CPCF04B37/08F25B9/14F25B45/00B01D8/00F25B2345/002F25B2345/003F25B2345/004F25B2600/05
Inventor 松井孝聪
Owner SUMITOMO HEAVY IND LTD
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