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A molding process of a high-density large-size azo target blank

A technology with high density target body, which is applied in metal material coating process, ion implantation plating, coating, etc. It can solve the problems of uneven density, uneven force, and difficult production, so as to increase the density and tissue uniformity, simple process operation, and the effect of increasing the solid phase volume fraction

Inactive Publication Date: 2016-01-13
CHINA NAT ACAD NANOTECH & ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main problems currently faced in the process of preparing AZO targets are: how to prepare a complete high-density large-size AZO target
The dry powder compression molding process is simple, fast, and easy to operate. It is a conventional molding method. However, for large-sized blanks, there are high cost of manufacturing molds, large mold losses, and uneven density during the pressing process. The interior of the green body causes defects such as delamination and defects; the isostatic pressing molding process can produce a green body with uniform density, but the mold used is complex and difficult to make, and it is not easy to prepare large-size AZO green bodies

Method used

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  • A molding process of a high-density large-size azo target blank
  • A molding process of a high-density large-size azo target blank
  • A molding process of a high-density large-size azo target blank

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0030]Mix 5kg (kilograms) of zinc oxide and aluminum oxide superfine powder, wherein the aluminum oxide superfine powder accounts for 2wt% (mass fraction) of the total mass of the mixed powder, and after spray drying and granulation, AZO with an average particle size of about 10 μm (micron) is obtained. Powder, fluidity 60s (seconds) / 50g (grams), put the granulated powder into a ball mill jar equipped with 10kg (kilograms) of corundum balls, add 40g (grams) of propylene to 1L (liters) of deionized water Amide, 10g (grams) gum arabic powder, 50g (grams) absolute ethanol, after stirring completely, the mixed solution is added in the ball milling jar, the ball milling jar is sealed, and it is vacuumized, and the roller ball milling is 2h (hour), in a vacuum The prepared slurry is poured into the attached figure 1 In the mold shown, after pouring is completed, it is immediately moved into a constant temperature and humidity box for drying and molding. After drying to constant weig...

Embodiment approach 2

[0032] Mix 5kg (kilograms) of zinc oxide and aluminum oxide superfine powder, wherein the aluminum oxide superfine powder accounts for 1wt% (mass fraction) of the mixed powder mass, and after spray drying and granulation, AZO mixed with an average particle size of about 7 μm (micron) is obtained. Powder, fluidity 73s (second) / 50g (gram), the powder after granulation is added in the ball mill jar that 10kg (kilogram) corundum ball is housed, add 40g (gram) propylene to 950mL (milliliter) deionized water Amide, 15g (grams) gum arabic powder, 60g (grams) absolute ethanol, after stirring completely, the mixed solution is added in the ball milling jar, the ball milling jar is sealed, and it is vacuumized after roller ball milling for 3h (hour), in a vacuum The prepared slurry is poured into the attached figure 2 In the mold shown, after pouring is completed, it is immediately moved into a constant temperature and humidity box for drying and molding. After drying to constant weight...

Embodiment approach 3

[0034] Mix 5kg (kilograms) of zinc oxide and aluminum oxide superfine powder, wherein the aluminum oxide superfine powder accounts for 3wt% (mass fraction) of the mixed powder mass, and after spray drying and granulation, AZO mixed with an average particle size of about 5 μm (micron) is obtained. Powder, fluidity 80s (second) / 50g (gram), add the powder after granulation into a ball mill jar equipped with 10kg (kilogram) corundum balls, add 40g (gram) propylene to 900mL (milliliter) deionized water Amide, 15g (grams) gum arabic powder, 80g (grams) absolute ethanol, after stirring completely, the mixed solution is added in the ball milling tank, the ball milling tank is sealed, and it is vacuumized after roller milling for 5h (hour), in a vacuum The prepared slurry is poured into the attached image 3 In the mold shown, after pouring is completed, it is immediately moved into a constant temperature and humidity box for drying and molding. After drying to constant weight in an en...

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Abstract

The invention discloses a forming process for a high density large size AZO target material blank body, which comprises the following steps: firstly mixing ultramicro powder of ZnO and A12O3, then pelleting, adding deionized water, dispersing agent, solidifying agent and surface active agent to perform mixing pulping, then infusing the mixture into a mould for forming, obtaining the high density large size AZO target material blank body with the relative density of 65 percent and 75 percent after drying, dewaxing. The AZO target material prepared by the forming process has the advantages that the forming density is high, the homogeneity of structure is excellent, the large size AZO target material is easy to prepare, and the uniformity of the forming blank body is excellent. The forming process is simple for operate, easy to control and suitable for industrialized production.

Description

technical field [0001] The invention relates to the field of photoelectric material preparation. In particular, it relates to a forming process of a high-density and large-size AZO target blank, and the high-density and large-size AZO target blank can be produced by using this process flow. Background technique [0002] With the rapid development of the information age, optoelectronic materials are widely used due to their excellent optical and electrical properties. Among them, oxide transparent conductive films have huge market applications in optoelectronic products such as light-emitting diodes, transparent electrodes, computers, mobile phones, and displays due to their high electrical conductivity and high light transmittance. [0003] At present, the ITO transparent conductive film is the most widely used in the market, and its production process is relatively mature, but because the indium element in the raw material is a rare metal element, its reserves are small an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/18C04B35/453C04B35/622
Inventor 牟诗城舒永春韩凌云曾学云
Owner CHINA NAT ACAD NANOTECH & ENG
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