High-resolution linear interferometer

A high-resolution, interferometer technology, applied to instruments, measuring devices, optical devices, etc., can solve problems such as low optical resolution, low measurement accuracy, and inability to meet industrial development.

Inactive Publication Date: 2013-10-30
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

Due to the characteristics of the corner cube prism itself, its outgoing light is strictly parallel to the incident light, so the linear interferometer does not have high requirements for installation and adjustment, and is especially suitable for long-distance measurement. However, the current linear interferometer only has twice the Optical subdivision, that is, the optical resolution is λ / 2, so the optical resolution of the linear interferometer in the prior art is not high, resulting in low measurement accuracy, which cannot meet the needs of industrial development

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Embodiment Construction

[0022] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0023] Please refer to figure 2 , figure 2 Shown is a schematic structural diagram of a high-resolution linear interferometer in a preferred embodiment of the present invention. The present invention proposes a high-resolution linear interferometer, including: a polarization beam splitter prism 100, a transmission arm corner cube prism 600, and a reflection arm corner cube prism 400, and the interferometer also includes a transmission arm quarter-wave plate 500, a reflector arm quarter-wave plate 300 and common corner cube prism 200,

[0024] Wherein, the common corner cube 200 and the reflection arm quarter-wave plate 300 are respectively arranged on opposite sides of the polarization beam splitter 100, and the transmission arm quarter-wave plate 500 is arranged on the polarization beam splitt...

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Abstract

The invention provides a high-resolution linear interferometer. The high-resolution linear interferometer comprises a polarization splitting prism, a transmission arm cube-corner prism and a reflection arm cube-corner prism and further comprises a transmission arm quarter-wave plate, a reflection arm quarter-wave plate and a common cube-corner prism, wherein the common cube-corner prism and the reflection arm quarter-wave plate are arranged on the two opposite side faces of the polarization splitting prism respectively, the transmission arm quarter-wave plate is arranged on a third side face, opposite to an incidence laser light source, of the polarization splitting prism, the transmission arm quarter-wave plate is arranged between the polarization splitting prism and the transmission arm cube-corner prism, and the reflection arm quarter-wave plate is arranged between the polarization splitting prism and the reflection arm cube-corner prism. The high-resolution linear interferometer still takes a cube-corner prism as an object to be tested, and adjustment requirements are not high when the interferometer is used. Through being additionally provided with the quarter-wave plates, the high-resolution linear interferometer has the advantage of four-times optical fine division and enables the optical resolution to be promoted to lambda/4.

Description

technical field [0001] The invention relates to the field of dual-frequency laser interferometers, and in particular to a high-resolution linear interferometer. Background technique [0002] Using a frequency-stabilized helium-neon laser as the light source, because of its large coherence length, the measurement range of the interferometer can be greatly expanded; and because of its small beam divergence angle and concentrated energy, the interference fringes it produces can be received by photoelectric Received by the detector, it becomes an electrical signal, and is recorded by the counter without omission, thereby improving the measurement speed and measurement accuracy. [0003] But this single-frequency laser instrument is not perfect, and one of its fundamental weaknesses is that it is seriously affected by the environment. This shortcoming is very prominent when the test environment is harsh and the measurement distance is long. The reason is that it is a DC measurem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G02B5/30
Inventor 张志平吴萍王珍媛张记晨池峰
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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