Method and apparatus for non-volatile memory unit
A technology of non-volatile storage and storage unit, which is applied in the field of non-volatile storage unit structure, and can solve problems such as difficulty in reliable operation
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[0038] The making and using of the preferred embodiment are discussed in detail below. It should be appreciated, however, that the present invention provides many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific examples discussed are merely illustrative of specific ways to make and use the embodiments, and do not limit the scope of the embodiments or the appended claims.
[0039] figure 1 A cross-sectional view of a typical MOS transistor type Silicon-Oxide-Nitride-Oxide-Silicon (SONOS) cell 11 is shown as a non-limiting example. In this example, cell 11 uses sidewall storage. Gate electrode 13 is formed over gate dielectric layer 15 formed over semiconductor substrate 20 . The semiconductor substrate may be formed from bulk silicon, gallium arsenide, germanium, silicon germanium, or other semiconductor materials used in integrated circuits. Source / drain regions 17 are shown on either side of the channel region 19 in ...
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