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Semiconductor production line optimized dispatching device

A technology for optimizing scheduling and production lines, applied in biological models, control/regulation systems, instruments, etc., can solve problems such as optimal scheduling schemes for semiconductor production lines that have not yet been discovered

Inactive Publication Date: 2013-12-11
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0018] Looking at the existing patents on semiconductor production line scheduling, they are mainly aimed at specific processing areas of semiconductor production lines; in the patents on semiconductor production line scheduling, the method based on rules, or the combination of rules selected by intelligent methods, has not yet been developed. Discovered the patent of directly using the intelligent optimization method to obtain the optimal scheduling scheme of the semiconductor production line

Method used

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  • Semiconductor production line optimized dispatching device
  • Semiconductor production line optimized dispatching device
  • Semiconductor production line optimized dispatching device

Examples

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Embodiment

[0073] image 3 A simplified model Mini-Fab of a semiconductor production line is given. The model includes 3 equipment groups (M 1 , M 2 , M 3 ), where: M 1 There are two interchangeable devices (M a , M b ), which simulates the diffusion processing area of ​​a semiconductor production line, and is a batch processing equipment; M 2 There are two interchangeable devices (M a , M b ), which simulates the ion implantation processing area of ​​the semiconductor production line, which is a non-batch processing equipment; M 3 There is a device (M e ), which simulates the lithography processing area of ​​a semiconductor production line, and is a non-batch processing equipment. The processing flow of the workpiece processed on this model is exactly the same, including 6 processing steps, respectively in M 1 , M 2 , M 3 The processing is completed on the above, and the specific processing flow can be found in the attached image 3 , the same process of different workpiec...

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Abstract

The invention relates to a semiconductor production line optimized dispatching device which comprises a dispatching server, a dispatching optimizer and a display device. The dispatching server, the dispatching optimizer and the display device are sequentially connected. The dispatching server obtains the current production situation and the list of workpieces to be dispatched by timing updating through a manufacturing execution system of an enterprise, the dispatching optimizer transmits a dispatching request to the dispatching server and receives the list of the workpieces to be dispatched from the dispatching server, and an ant colony immune fusion algorithm is applied to obtain the optimized dispatching schemes. The display device displays the optimized dispatching schemes on stations, and assists production management personnel in dispatching decisions. Compared with the prior art, the semiconductor production line optimized dispatching device has the advantages of solving the difficult problem of semiconductor production line optimized dispatching, having important practical value, having important guiding significance in improving the production management level of the semiconductor enterprises in China and the like.

Description

technical field [0001] The invention relates to a semiconductor production line scheduling technology, in particular to a semiconductor production line optimization scheduling device. Background technique [0002] In the production system using assembly line workshop processing, a conveyor system transports the work-in-process (WIP) along the workbench, and at each workbench, a different process of WIP is completed. In theory, the WIP visits each station once during a start-to-finish machining run. A semiconductor production line is different from most production systems that use assembly-line shop processing. In the semiconductor production line, WIP may visit the same workbench several times during the processing process. WIP has to go through several cleaning, oxidation, deposition, metal spraying, etching, ion implantation and stripping processes until the semiconductor product is completed. [0003] figure 1 A simplified multi-product semiconductor production line SL...

Claims

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Application Information

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IPC IPC(8): G05B13/04G06N3/00
Inventor 李莉吴启迪乔非陈隆
Owner TONGJI UNIV
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