Femtojoule class pulsed laser light source
A pulsed laser, femtojoule-level technology, applied in the field of optical metrology, can solve the problems that the transmittance of the neutral attenuator cannot be calibrated and verified, the uniformity of the beam cannot be guaranteed, and the accurate value cannot be provided, so as to avoid the transmittance Unable to calibrate and verify, the transmittance is stable and reliable, and the effect of avoiding the problem of beam inhomogeneity
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[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings and preferred examples.
[0016] Such as figure 2 As shown, the femtofocus light source of the preferred embodiment of the present invention includes a laser 1, a collimator mirror 2, a beam splitter mirror 3, a monitoring energy meter 4, a polarizer assembly 5, a fixed attenuator assembly 6, a reference energy meter 7, a one-dimensional Platform, variable attenuator 8, beam expander 9 and computer 10. The variable attenuator 8 selects a femtojoule-level pulsed laser attenuation device with continuously adjustable attenuation ratio disclosed in Chinese patent application 201210208446.4. module enables variable attenuators 8 to achieve 0.85×10 -4 Accurate transmittance of ~0.45.
[0017] Laser 1 is a linearly polarized light pulse laser with an output energy of 1mJ to 10mJ. In order to meet the system requirements, the energy stability must be better than 1%....
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