Inspection system for use with scanning electron microscope

An electron microscope and inspection system technology, applied in the field of inspection systems, can solve the problems of image difficulty, size limitation, pollution, etc. of the object to be inspected, and achieve the effect of correct inspection, cost realization, and inspection realization
CN103454295AActive Publication Date: 2013-12-18SAMSUNG DISPLAY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SAMSUNG DISPLAY CO LTD
Publication Date
2013-12-18

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Abstract

An inspection system using a scanning electron microscope includes a scanning electron microscope chamber inspecting an object to be inspected by using an electron beam and maintaining a vacuum condition, a stage positioned below the scanning electron microscope chamber to be separated therefrom and mounted with the object to be inspected, and a transverse guide transferring the scanning electron microscope chamber on the stage. Atmospheric conditions are maintained between the scanning electron microscope chamber and the object to be inspected. Accordingly, object to be inspected a large size of an object to be inspected may be inspected without damage to the object to be inspected such that a cost reduction and a yield improvement may be realized.
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Description

technical field

[0001] The present invention generally relates to an inspection system using a scanning electron microscope, and more particularly, to an inspection system using a scanning electron microscope to perform inspection of an object under atmospheric conditions without limiting the size of the object. Background technique

[0002] Generally, flat panel display devices such as liquid crystal display (LCD) devices and organic light emitting diode (OLED) display devices are formed by depositing a plurality of thin films and wires on a substrate. In order to inspect the presence of defects such as impurities or particles on the film of the flat panel display device or to inspect short circuits between electric wires, an inspection system configured with a scanning electron microscope (SEM) is used.

[0003] A vacuum scanning electron microscope may be used in the inspection system. The size of samples observed by contemporary SEMs is limited by the size of the vacuum...

Claims

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