Automatic handling system

Abstract

The invention discloses an automatic handling system, which comprises equipment arranged in a matrix type, a track structure, at least one delivery wagon and a control unit, wherein each piece of equipment is provided with a stacking part and a silicon chip box storing and taking mechanism, and an equipment passage where the stacking part of each piece of equipment is located is provided with only one track. After the above technical scheme is adopted, the number of tracks is effectively reduced, the structure of the track is simpler compared with that of the track in the prior art, the load of a roof of a system space, such as a ceiling is greatly reduced, and the safety is improved; since the time of storing and taking the boxes is saved, the automatic handling system can always run on a main track, so that the integral handing efficiency of the handling system is improved; the operation burden of the control unit is reduced, and the stability of the system is ensured.

Description

technical field [0001] The invention relates to the technical field of material conveying equipment for semiconductor integrated circuits, in particular to an automatic silicon wafer box conveying system. Background technique [0002] With the development of semiconductor technology, 300mm silicon wafers have gradually replaced 200mm silicon wafers and become the mainstream, and the weight of each silicon wafer box loaded with silicon wafers has also changed from about 4 kg to about 9 kg. Therefore, manual transport is still carried by manpower, which not only reduces efficiency, but also has the possibility of personal injury of the transporter. At the same time, semiconductor manufacturing has increasingly stringent requirements on plant utilization and production cycle, and the importance of Automated Material Handling Systems (AMHS) as a link to transport silicon wafers between various manufacturing modules is also increasing. stand out. [0003] Due to the transformat...

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Problems solved by technology

[0006] However, although the existing conveying system as described in the above-mentioned patent can realize the direct transportation of silicon wafer cassettes between two devices, it needs to set up a complicated track structure, especially at least one track must be set up at each device, resulting in a The structure is complicated, the ceiling load increases, and the safety is affected; on the other hand, the many tracks also create troubles for the OHT trolley to choose the best path. , to some extent affects the transfer efficiency

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