Dynamic imaging method of atomic force microscope based on step response curve of piezoelectric scanning tube
A technology of atomic force microscope and piezoelectric scanning tube, which is applied in the field of precision instruments and can solve problems such as imaging distortion
Active Publication Date: 2015-11-18
NANKAI UNIV
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0006] The purpose of the present invention is to solve the problem of image distortion caused by ignoring the dynamic characteristics of the piezoelectric scanning tube during fast scanning of the atomic force microscope, and proposes a dynamic imaging method for the atomic force microscope based on the step response curve of the piezoelectric scanning tube. Works well to overcome the image distortion problem that occurs during fast scans
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0061] On the basis of the original CSPM4000 series atomic force microscope system, we built an atomic force microscope real-time control platform based on RTLinux system [23]. On the basis of this platform, we implemented the dynamic imaging method proposed by the present invention.
[0062] 1) First obtain the dynamic characteristic information of the piezoelectric scanning tube, the steps are as follows:
[0063] 1.1) Calibration of gain coefficient
[0064] Under open-loop control, the attached grating is used to figure 2 The pre-high voltage amplifier gain factor of the piezoelectric scan tube in , and the laser detection system gain coefficient For calibration, the specific calibration method can be found in literature [21].
[0065] 1.2) Measurement of the step response curve of the piezoelectric scanning tube
[0066] Under open-loop control, the unit step signal is applied to the piezoelectric scanning tube through the RTLinux control platform, and the output si...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A dynamic imaging method of atomic force microscope based on the step response curve of piezoelectric scanning tube. Aiming at the problem of image distortion caused by ignoring the dynamic characteristics of the piezoelectric scanning tube during the fast scanning of the atomic force microscope. The present invention first measures the step response curve of the piezoelectric scanning tube through an experimental method, and the curve contains the dynamic characteristic information of the piezoelectric scanning tube, and then convolves the step response curve with the control input voltage to obtain the piezoelectric scanning Finally, the transient displacement of the piezoelectric scanning tube is combined with the control error to calculate the topography image of the sample surface. Compared with the existing method, the invention is simple and practical, and avoids the huge workload brought by the traditional method of identifying the model of the piezoelectric scanning tube and the problem that the identified model will lose part of the high-frequency characteristic information of the piezoelectric scanning tube. Experimental results show that the invention can well overcome the imaging distortion during fast scanning.
Description
technical field [0001] The invention belongs to the field of precision instruments in micro-nano science and technology research, and is specifically an atomic force microscope (AFM). The invention mainly relates to an atomic force microscope dynamic imaging method based on a piezoelectric scanning tube step response curve. Background technique [0002] The invention of the atomic force microscope [1] revolutionized the field of nanoscience and technology [2]. Compared with other nano-imaging instruments, the atomic force microscope is not limited by the conductivity of the sample, and can work in a variety of environments, such as vacuum environment, atmospheric environment, liquid phase environment, etc. [0003] The atomic force microscope is a type of scanning probe microscope. The expansion and contraction of the piezoelectric scanning tube is adjusted through feedback control to keep the force between the probe and the sample (or the amplitude of the probe in tapping m...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24
Inventor 方勇纯任逍张雪波齐宁宁
Owner NANKAI UNIV