Atomic force microscope dynamic imaging method based on step response curve of piezoelectric scanning tube
An atomic force microscope, piezoelectric scanning tube technology, applied in the field of precision instruments, can solve problems such as imaging distortion
Active Publication Date: 2013-12-25
NANKAI UNIV
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Problems solved by technology
[0006] The purpose of the present invention is to solve the problem of image distortion caused by ignoring the dynamic characteristics of the piezoelectric scanning tube during fast scanning of the atomic force microscope, and proposes a dynamic imaging method for the atomic force microscope based on the step response curve of the piezoelectric scanning tube. Works well to overcome the image distortion problem that occurs during fast scans
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Embodiment 1
[0066] On the basis of the original CSPM4000 series atomic force microscope system, we built an atomic force microscope real-time control platform based on RTLinux system [23]. On the basis of this platform, we implemented the dynamic imaging method proposed by the present invention.
[0067] 1) First obtain the dynamic characteristic information of the piezoelectric scanning tube, the steps are as follows:
[0068] 1.1) Calibration of gain coefficient
[0069] Under open-loop control, the attached grating is used to figure 2 The pre-high voltage amplifier gain factor of the piezoelectric scan tube in , and the laser detection system gain coefficient For calibration, the specific calibration method can be found in literature [21].
[0070] 1.2) Measurement of the step response curve of the piezoelectric scanning tube
[0071] Under open-loop control, the unit step signal is applied to the piezoelectric scanning tube through the RTLinux control platform, and the output si...
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Disclosed is an atomic force microscope dynamic imaging method based on the step response curve of a piezoelectric scanning tube. The atomic force microscope dynamic imaging method solves the problem that during atomic force microscope quick scanning, an obtained image distorts due to the fact that the dynamic characteristic of the piezoelectric scanning tube are neglected. The atomic force microscope dynamic imaging method comprises the steps that firstly, the step response curve of the piezoelectric scanning tube is measured through the experiment method, wherein the curve comprises the dynamic characteristic information of the piezoelectric scanning tube; then, convolution is conducted on the step response curve and control input voltage to obtain the transient state displacement of the piezoelectric scanning tube; at last, the transient state displacement of the piezoelectric scanning tube is combined with control errors to work out an appearance image of the surface of a sample. Compared with an existing method, the atomic force microscope dynamic imaging method is simple and practical, and overcomes the defects that in the traditional method, tremendous workload can be brought by identifying a model of the piezoelectric scanning tube, and the model obtained through identification can cause part of high-frequency characteristic information of the piezoelectric scanning tube to be lost. According to experiment results, the atomic force microscope dynamic imaging method based on the step response curve of the piezoelectric scanning tube cab well overcome the defect of imaging distortion during quick scanning.
Description
technical field [0001] The invention belongs to the field of precision instruments in micro-nano science and technology research, and is specifically an atomic force microscope (AFM). The invention mainly relates to an atomic force microscope dynamic imaging method based on a piezoelectric scanning tube step response curve. Background technique [0002] The invention of the atomic force microscope [1] revolutionized the field of nanoscience and technology [2]. Compared with other nano-imaging instruments, the atomic force microscope is not limited by the conductivity of the sample, and can work in a variety of environments, such as vacuum environment, atmospheric environment, liquid phase environment, etc. [0003] The atomic force microscope is a type of scanning probe microscope. The expansion and contraction of the piezoelectric scanning tube is adjusted through feedback control to keep the force between the probe and the sample (or the amplitude of the probe in tapping m...
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IPC IPC(8): G01Q60/24
Inventor 方勇纯任逍张雪波齐宁宁
Owner NANKAI UNIV