Method for manufacturing trapezoid-shaped groove for positioning optical fiber array
An optical fiber array and manufacturing method technology, applied in the coupling of optical waveguides and other directions, can solve the problems of high cost, low yield, poor positioning accuracy of positioning grooves, etc., and achieve the effect of improving reliability and avoiding damage
Active Publication Date: 2013-12-25
HENAN SHIJIA PHOTONS TECH
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Problems solved by technology
At present, the methods of manufacturing positioning grooves for optical fiber arrays include wet etching silicon wafers with specific crystal orientations and machining V-shaped grooves, etc., but the positioning grooves made by these methods have technical problems such as poor positioning accuracy, high cost, and low yield.
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[0025] like Figure 1~6 As shown, a method for manufacturing a trapezoidal groove for positioning an optical fiber array includes the following steps:
[0026] 1) The hard mask 2 is grown on the wafer 1;
[0027] 2) Coating photoresist 3 on the hard mask 2;
[0028] 3) Using a photolithography process, transfer the pattern of the trapezoidal groove 6 used for positioning the optical fiber array 5 on the photolithography plate 4 to the photoresist 3;
[0029] 4) Using plasma etching technology, the pattern of the trapezoidal groove 6 is further transferred to the hard mask 2;
[0030] 5) Using plasma etching technology, etch a trapezoidal groove 6 on the wafer 1, the junction 9 between the side wall 7 of the trapezoidal groove 6 and the upper surface 8 of the wafer 1 is a smooth arc surface;
[0031] 6) Remove the remaining hard mask 2 on the wafer 1 .
[0032] like Figure 7 , 8 As shown, the trapezoidal groove 6 is an isosceles trapezoidal groove, and its maximum groove...
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The invention provides a method for manufacturing a trapezoid-shaped groove for positioning an optical fiber array. The method comprises the following steps that hard mask growth is conducted on a wafer; (2) a hard mask is coated with photoresist; (3) the pattern of the trapezoid-shaped groove for positioning the optical fiber array is transferred to the photoresist through the photolithography technology; 4) the plasma etching technology is used for transferring the pattern of the trapezoid-shaped groove to the hard mask; 5) the trapezoid-shaped groove is etched in the wafer through the plasma etching technology, wherein the junction between the side wall of the trapezoid-shaped groove and the upper surface of the wafer is a smooth arc face; 6) the residual hard mask on the wafer is removed. According to the method for manufacturing the trapezoid-shaped groove for positioning the optical fiber array, the problems of poor positioning precision, high cost and low finished product rate caused by wet etching, machining and other methods which are commonly used for manufacturing optical fiber array positioning grooves in the prior art can be solved, and the assembly efficiency and reliability of the optical fiber array can be effectively improved.
Description
technical field [0001] The invention relates to a method for manufacturing a positioning groove for an optical fiber array, in particular to a method for manufacturing a trapezoidal groove for positioning an optical fiber array by using plasma etching technology. Background technique [0002] Optical fiber communication is a communication method that uses light as the carrier of information and optical fiber as the transmission medium. Compared with other traditional communication methods, optical fiber communication has huge advantages. With the continuous development of information technology and the acceleration of the informatization process, optical fibers and optical chips are used more and more widely, such as optical fiber communication systems, optical fiber data networks, and optical fiber CATV. Optical fiber array is an important component of passive optical network. It is mainly used in planar optical waveguide devices, such as optical splitters, arrayed wav...
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Inventor 查强孟繁春杜卫星苏晓华胡炎彰王睿王红杰钟飞
Owner HENAN SHIJIA PHOTONS TECH