Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer

A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error, inconsistent influence, and inability to determine whether the interferometer group and measuring mirror belong to standard laser interferometer components or It belongs to the problem of being calibrated, and achieves the effect of small Abbe error and guaranteed accuracy

CN103499278AActive Publication Date: 2014-01-08HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2014-01-08

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Abstract

The invention relates to a method and a device for calibrating a morphology compensation type four-optical-axis linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a four-axis hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position among four parallel standard measurement beams distributed in a side edge form of a regular quadrangular prism; in a plane vertical to the four standard measurement beams and in a square region formed by projection points of the four standard measurement beams in the plane, difference between the degrees that the four standard measurement beams and the measurement beam of the calibrated laser interferometer are interfered by the environment is small and the average value of the air refractive indexes of the four standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of a linear displacement measurement value.
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Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

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Embodiment Construction

[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0028] A shape-compensated four-axis axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and four receivers 8, 9, 10, 11 arranged at positions capable of receiving standard laser interferometer interference signals, and wires Connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; on the output optical path of the standard laser interferometer laser 1, an intermediate through hole 16 is arranged to allow the calibrated laser interferometer to measure the light beam 15 through the four-axis hollow standard laser interference mirror group 2; one side of the four-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 21, the moving table 20 is fitted on the guide rail 21, and a flat mirro...