Large-scale submicron-level high-precision gas-to-electricity converter

Abstract

The invention relates to a high-measurement-range submicron-level high-precision pneumatic electric converter which comprises a bistable air pressure measurement room, a precision signal conditioning part and a PC, wherein a gas pressure stabilization filter is connected with the bistable air pressure measurement room; the bistable air pressure measurement room is connected with a piezoelectric sensor; a precision adjustable double voltage stabilization reference power supply is connected with the piezoelectric sensor and a nuller respectively; the piezoelectric sensor is connected with a high-gain amplifier, the nuller, an active filter, an A / D converter and a single chip sequentially; the active filter is connected with an analog output interface; the single chip is connected with a 232 serial interface; the 232 serial interface is connected with the PC; and the PC is communicated with the single chip in real time rapidly through the 232 serial interface, so that the measurement value, which is required by the single chip, of the pneumatic electric converter, can be acquired in real time. According to the high-measurement-range submicron-level high-precision pneumatic electric converter, the conversion efficiency of the convertor is effectively improved; the accuracy in a measurement range is high; and when the measurement range ranges between minus 40 mu m and plus 40 mu m, the field measurement requirements of various high-precision and high-flexibility production lines are met.

Description

Technical field [0001] The invention relates to a converter, in particular to a large-range submicron high-precision gas-electric converter. Background technique [0002] The gas-electric converter can measure various dimensional tolerances and shape tolerances such as inner diameter, outer diameter, taper, parallelism, etc., and is widely used in high-precision automotive parts, household air-conditioning / refrigerator compressors, bearings and aerospace Part measurement. The existing gas-electric converter has a relatively low accuracy. When the measurement range is ±20um, the accuracy is 0.8um; when the measurement range is ±40um, the accuracy is 1.6um. In addition, when performing multi-variety, high-precision measurements, it is necessary to frequently adjust the measurement linear section magnification, which brings great inconvenience to on-site use and adjustment, and also affects the flexibility of the measurement equipment itself. Utility model content [0003] The purp...

AI Technical Summary

Problems solved by technology

The accuracy of existing gas-to-electric converters is relatively low. When the measurement range is ±20um, the accuracy is 0.8um; when the measurement range is ±40um, the accuracy is 1.6um

In addition, when carrying out multi-variety and high-precision measurement, it is necessary to frequently adjust the magnification of the measurement linear section, which brings great inconvenience to on-site use and adjustment, and also affects the flexibility of the measurement equipment itself.

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