A method and system for realizing automatic value compensation in glass substrate exposure process

Abstract

Disclosed is a system for realizing automatic value filling in a glass substrate exposure process. The system comprises a measuring machine (1), a communication interface module network (3), and an exposure machine (2), wherein the measuring machine (1) is used for automatically measuring an exposed glass substrate and uploading measured exposure offset data of various measuring points to a preset storage area of the exposure machine (2) through the communication interface module network (3); the exposure machine is used for obtaining corresponding value filling amounts of the various measuring points depending on the exposure offset data of the measuring points, and performing value filling treatment on the exposure points corresponding to the measuring points on the glass substrate. A corresponding method for realizing automatic value filling is also disclosed. The system and method can be used for improving the value filling efficiency and value filling accuracy of the exposure machine, and saving labor.

Description

technical field [0001] The present invention relates to a thin film transistor liquid crystal display (Thin Film Transistor liquid crystal display, TFT-LCD) manufacturing technology, in particular to a method and system for realizing automatic value compensation in the exposure process of a glass substrate. Background technique [0002] In the photolithography process of the TFT-LCD process, an exposure machine (Exposure) is required to realize the exposure process on the glass substrate coated with the photoresist film and the photomask through the exposure machine. In this step, the position accuracy of the exposure determines the alignment and manufacturing accuracy of the glass substrate in the subsequent process. If the exposure position deviation is abnormal, the position of the pattern in the next process will not match, which may cause the transistor in the TFT substrate to fail. Light leakage occurs in the red, green and blue (RGB) pixels in the pass or color filter...

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Problems solved by technology

[0005] The inventors have found that the existing process of measuring and supplementing has the following disadvantages: first, the calculation and input of the supplement need to be performed manually by the operator, so that on the one hand there is a risk of making mistakes, and on the other hand On the one hand, if the personnel do not confirm the results and make up the value in time, it will lead to glass substrates with abnormal exposure accuracy. For example, in an implementation situation, if the takt time is 30 seconds, more than 20 exposures may occur within 10 minutes. Glass substrates with abnormal precision, these glass substrates with abnormal exposure precision can only be reworked, resulting in waste; moreover, according to experience, because of the setting of the sampling inspection mode of the measuring machine, the re-entry amount of the first glass substrate after the compensation is completed The probability of measurement by the testing machine is very low, and the effect after value compensation cannot be confirmed in time; in addition, in order to achieve stable product quality characteristics, the operator needs to continue to confirm and compensate the value, which requires a lot of labor and time. and poor reliability

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