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Simple detection method of silane gas purity

A determination method and technology of gas purity, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems that the operating conditions are difficult to meet in the production site, the instruments are expensive, etc., and achieve the requirements of low test conditions, high accuracy and reproducibility. Good results

Inactive Publication Date: 2014-02-05
李耀文
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Problems solved by technology

[0003] At present, the determination method of silane purity is mainly determined by gas chromatography with helium discharge ionization detector, the required equipment is expensive, and the operating conditions are difficult to meet in the production site

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  • Simple detection method of silane gas purity
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Embodiment Construction

[0013] Please refer to the attached figure 1 And attached figure 2 Shown, the present invention is a kind of simple and easy measuring method of silane gas purity, and it utilizes the principle that silane reacts with sodium hydroxide solution, calculates the purity of silane according to the growth of gas, and it comprises the following process steps:

[0014] 1), choose a medical syringe, absorb the blocking liquid and remove the gas in the medical syringe, absorb the gas to be tested and read the value X1;

[0015] 2) Put the aspirated medical syringe into the sodium hydroxide solution for reaction and absorption. After the complete reaction is balanced, read the value X2 at this time;

[0016] 3), the percentage of the difference between the two values ​​in the sample taken is the value of the silane reaction growth;

[0017] 4), and then the ratio of the value of silane reaction growth to the value of pure silane complete reaction growth is the purity of silane, that i...

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Abstract

The invention relates to a simple detection method of silane gas purity. The simple detection method comprises the following processing steps: (1) selecting a medical injector, absorbing confining liquid, removing gas inside the medical injector, absorbing gas to be detected and reading a numerical value X1; (2) putting the medical injector with absorption in a sodium hydroxide solution for reaction absorption, and reading a numerical value X2 at that time after the reaction balance is completed; (3) calculating the percentage of the difference of the two numerical values in the sample, thus obtaining an increasing numerical value of silane reaction; (4) then calculating the ratio of the increasing numerical value of silane reaction to an increasing numerical value of pure silane complete reaction, thus obtaining the purity of silane, wherein the calculation formula is that the purity W% is equal to (((X2-X1) / X1*100%) / 300%)*100%. The simple detection method of silane gas purity disclosed by the invention has the advantages of no pollution to the environment, low requirement on experimental conditions, simplicity and convenience in operation, good reproducibility, high accuracy and the like.

Description

【Technical field】 [0001] The invention relates to a simple method for measuring the purity of silane gas, which belongs to the technical field of silane production and application. 【Background technique】 [0002] Silane is a flammable gas at room temperature and will spontaneously ignite when it comes in contact with air. When heated or burned, silane decomposes to form silicon and hydrogen, posing a fire and explosion hazard. Silane is widely used in integrated circuit manufacturing, solar cells, coated reflective glass, etc. Being able to quickly determine the purity of silane is one of the main tasks of dynamic monitoring in the industrial production process, and it is an important means to ensure the normal operation of production. Therefore, how to quickly determine the purity of silane is of great significance. [0003] At present, the determination method of silane purity mainly adopts gas chromatograph with helium discharge ionization detector, the required equipm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00
Inventor 李耀文耿彩军刘斌靳东梅张增玉孙佳杰
Owner 李耀文
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