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A kind of anti-friction platinum/graphene composite structure and preparation method thereof

A graphene composite, graphene technology, applied in microstructure technology, microstructure device, coupling of optical waveguides, etc., can solve the problems of friction and wear, surface adhesion restriction, etc., achieve good repetition rate, low cost, operability strong effect

Active Publication Date: 2016-03-30
GUANGZHOU JINGBANG HYDRAULIC SEAL TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] With the significant reduction of the characteristic scale, the ratio of the surface area to the volume of the microelectromechanical system (MEMS) increases relatively, and the surface effect is greatly enhanced. The problems caused by friction, wear and surface adhesion have become the bottleneck restricting the development of MEMS.

Method used

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  • A kind of anti-friction platinum/graphene composite structure and preparation method thereof
  • A kind of anti-friction platinum/graphene composite structure and preparation method thereof

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, it should be understood that these embodiments are only used to illustrate the present invention, and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art understand each aspect of the present invention The modifications of all equivalent forms all fall within the scope defined by the appended claims of this application.

[0020] The double-tube CVD furnace used in this example grows graphene. There are 3 temperature zones, and each temperature zone can be controlled independently. The SiO 2 / Si substrate was purchased from Hefei Kejing Material Technology Co., Ltd.

[0021] (1) Purchasing high-purity Ar and H 2 and CH 4 Gas, copper foil with a thickness of 25 μm, ready to grow graphene;

[0022] (2) Cut the copper foil into strips with a length of 30′150mm, place them in the middl...

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Abstract

The invention discloses a friction-resistant Pt (platinum) / graphene composite structure. The composite structure is located on an SiO2 / Si substrate and comprises graphene and a Pt microstructure array, wherein the graphene is contacted with an SiO2 layer of the substrate, and the Pt microstructure array is grown on the surface of the graphene. The Pt microstructure array and the graphene form a composite friction-resistant structure, so that the frictional characteristic of graphene materials is improved. A preparation method comprises the steps as follows: growing the graphene materials on a piece of Cu foil with a chemical gas deposition method, wherein the number of layers of graphene materials are controlled between 4 and 10; then corroding the Cu foil with a FeCl3 solution and transferring the graphene to the SiO2 / Si substrate; and growing the Pt microstructure array on the surface of the graphene with masking and magnetron sputtering methods. Friction-wear tests prove that the composite structure is excellent in friction performance, simple in preparation method and applicable to MEMS (micro-electro-mechanical system) device surfaces requiring friction resistance.

Description

technical field [0001] The invention relates to the design and preparation of a Pt / graphene friction-resistant composite structure, belonging to the technical field of material preparation. Background technique [0002] With the significant reduction of the characteristic scale, the ratio of the surface area to the volume of the microelectromechanical system (MEMS) increases relatively, and the surface effect is greatly enhanced. The problems caused by friction, wear and surface adhesion have become the bottleneck restricting the development of MEMS. [0003] To solve the lubrication problem of MEMS, it is necessary to take the atoms and molecules on the interface as the research object, and find lubricants and lubrication methods that can be applied to microscopic working conditions. Graphite materials have excellent friction properties, and graphene materials are also excellent friction materials, which are very suitable for MEMS and other surfaces that require wear resis...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02B81C1/00
Inventor 顾正彬吴红艳张善涛陈延峰
Owner GUANGZHOU JINGBANG HYDRAULIC SEAL TECH
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