Calculation method for fast estimating yield of integrated circuit
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- PKU HKUST SHENZHEN HONGKONG INSTITUTION
- Publication Date
- 2014-02-12
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Abstract
Description
technical field
[0001] The invention relates to the technical field of integrated circuit testing and design, in particular to a calculation method for rapidly estimating the yield rate of integrated circuits. Background technique
[0002] In recent years, with the continuous reduction of device size, traditional metal oxide semiconductor field effect devices have encountered physical bottlenecks in various small sizes, and further development has been limited. One of the very important limiting factors is the fluctuation of the process parameters of the device under the small size. The statistical deviation of various parameters related to the process and the device itself increases with the decrease of the size. This random fluctuation leads to the drift of the electrical performance parameters of the device, thus causing the statistical deviation of the electrical index of the circuit. The direct result of these deviations is that some circuits with severe electrical cha...