Measuring and calculating method for geometrical parameters of large-caliber off-axis aspheric optical element
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An off-axis aspheric and optical element technology, applied in the field of optical detection, can solve the problem that the geometric parameters of large-diameter off-axis aspheric optical elements are difficult to accurately measure, and achieve the effect of improving the measurement accuracy
Inactive Publication Date: 2014-02-19
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0005] In order to solve the problem that the geometric parameters of the existing large-diameter off-axis aspheric optical elements are difficult to accurately
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specific Embodiment approach 1
[0026] Specific implementation mode one, combination Figure 1 to Figure 6 In this implementation, the method for measuring and calculating the geometric parameters of the large-aperture off-axis aspheric optical element described in this implementation mode uses compensators, laser interferometers, laser trackers and regulators to measure and calculate the geometric parameters of the off-axis aspheric elements . The method flow is as follows:
[0027] Step 1. Adjust the relative positional relationship between the interferometer 1, the compensator 2 and the aspheric optical element 4 to be inspected through the interferometer position adjuster 6, the compensator position adjuster 7 and the aspheric optical element position adjuster 8 to be inspected. Observe and measure the output of the interferometer 1 to achieve zero fringes and the minimum surface error, so as to ensure that the three are coaxial.
[0028] Step 2: Fix the position of the adjuster corresponding to the interfer...
specific Embodiment approach 2
[0062] Specific implementation mode two, combination Figure 7 to Figure 10 To describe this embodiment, this embodiment is an example of using the method for measuring geometric parameters of a large-aperture off-axis aspheric optical element described in the first embodiment:
[0063] Step A: Adjust the relative positional relationship between the compensator, the interferometer and the aspheric element to be inspected, and observe and measure the output of the interferometer to achieve zero fringe and the minimum surface error to ensure that the three are coaxial.
[0064] Step B: Fix the relative positions of the interferometer, the compensator, and the aspheric elements to be inspected unchanged, and use the laser tracker to measure the coordinates of a group of compensator cylinders and the coordinates of a group of aspheric mirrors to be inspected.
[0065] Implement steps A and B, get [col_x 1 ,col_y 1 ,col_z 1 ;col_x 2 ,col_y 2 ,col_z 2 ;...Col_x m ,col_y m ,col_z m ] And [x...
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Abstract
The invention relates to the field of optical detection and discloses a measuring and calculating method for geometrical parameters of a large-caliber off-axis aspheric optical element. The problem that the geometrical parameters of an existing large-caliber off-axis aspheric optical element are difficult to accurately measure is solved. An adjustment compensator, an interferometer and the aspheric element to be tested are coaxial. A laser tracker is used for respectively measuring coordinates of the outer surface of the compensator and coordinates of the aspheric mirror to be detected. Coordinate data measured on the cylindrical surface of the compensator are used for fitting the optical axis direction of the aspheric element. According to the fitted optical axis direction, coordinate measuring points on the aspheric element to be tested under a measuring coordinate system are rotated so that an optical axis corresponding to the measuring points after rotating can be in parallel with a Z axis of the measuring coordinate system. Non-linear least square fitting is performed on measuring point coordinates of pyramid reflection mirror sphere centers at the contact positions of the aspheric mirror after rotating according to an equation for a surface, so that the geometrical parameters of the aspheric optical element to be tested are obtained. The method is simple in measuring process and suitable for measuring and calculating the geometrical parameters of the large-caliber off-axis aspheric element.
Description
Technical field [0001] The invention relates to the field of optical detection, in particular to a method for measuring and calculating geometric parameters of a large-aperture off-axis aspheric optical element. Background technique [0002] With the rapid development of space optics and astronomical optics, the demand for large-aperture off-axis aspheric optical components is increasing. The use of aspheric elements in optical design can correct aberrations more effectively than spherical elements. Off-axis aspheric elements can also avoid center obstruction, ensure compact structure, improve transfer function, and achieve a large field of view. Therefore, optical systems with large-aperture off-axis aspheric elements as the core are popular in the fields of space remote sensing, astronomical observation, and deep space exploration. [0003] The processing and inspection of aspherical components are much more difficult than spherical components. The radius of curvature of each ...
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IPC IPC(8): G01B11/00G01B11/255
Inventor 郭玲玲任建岳张星祥张立国何斌李亚鹏
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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