A fast photodetector
A photodetector and fast technology, applied in the direction of electric solid devices, circuits, electrical components, etc., can solve the problems of complex structure design, affecting response speed, eliminating slow carriers, etc. remove the effect of the condition
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[0019] Such as figure 1 As shown, the photodetector of this example is manufactured using a vertical CMOS process, wherein the photodiode adopts a vertical structure and is fabricated on an N+ substrate 101 as the cathode of the phototube, and an N- epitaxial layer 102 is formed above the substrate. A layer of P+ injection region 103 is carried out in the epitaxy as the anode of the photoelectric tube, and a layer of anti-reflection film 104 is covered above the P+ injection region 103 to improve the light absorption efficiency of the photoelectric tube. The anode metal electrode 105 and the cathode metal electrode 106 are respectively Made on the surface and back of the photodiode, the metal covering area 107 and the anode metal electrode 105 adopt the same layer of metal version, covering around the photodiode, without any potential. The amplifying circuit is composed of several NMOS transistors 108 and PMOS transistors 109, which are interconnected with photodiodes through ...
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