Terahertz room temperature detector with high-absorbability structure and manufacturing method thereof

Abstract

The invention discloses a terahertz room temperature detector with a high-absorbability structure and a manufacturing method of the terahertz room temperature detector. The terahertz room temperature detector is used for detecting terahertz wave bands. The top layer of the detector is a metal pattern with a sub-wavelength structure, and as an electronic resonator, the metal pattern is used for absorbing terahertz waves with specific frequency; the second layer of the detector is a composite-film microbridge, wherein the bridge surface and a cavity of the microbridge serve as a dielectric layer; the bottom layer of the detector is a thick metal layer plane, wherein the main function of the thick metal layer plane plays is reducing transmission. The metal pattern on the topmost layer is a cross resonator with a square cross structure. The structure has an obvious absorption peak due to high resonance, and the resonance is not sensitive to the polarization of the incident terahertz waves due to the rotation symmetry of the structure. The terahertz room temperature detector with the high-absorbability structure has the characteristics of high absorbability and high sensitivity and further has the advantages of integration easiness, array forms, operation under room temperatures, real-time detection, small size and the like.

Description

technical field [0001] The invention relates to the technical field of terahertz wave detection, and relates to a terahertz room temperature detector with a high absorption structure and a preparation method thereof. technical background [0002] Terahertz wave refers to electromagnetic radiation with a frequency between 0.1~10THz (wavelength 3mm~30um), and its electromagnetic spectrum is between the microwave and infrared bands. Therefore, the terahertz system takes into account the advantages of both electronics and optical systems. For a long time, due to the lack of effective THz radiation generation and detection methods, people's understanding of the nature of electromagnetic radiation in this band is very limited, so that this band is called the THz gap in the electromagnetic wave. This band is also the last frequency window in the electromagnetic spectrum to be fully studied. Recently, electromagnetic metamaterials have been extensively studied at wavelengths rangin...

AI Technical Summary

Problems solved by technology

But at present, they all use thicker dielectric layers and only use the absorber for experimental measurement of terahertz absorption, and have not involved in the research of terahertz detection devices.

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