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A kind of LED wafer testing method and testing system

A test method and wafer technology, applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve the problems of LED wafer Mapping full measurement value error, affecting production cycle, batch rework, etc., to achieve Solve the problem of hysteresis in abnormal control and improve production efficiency and product yield

Inactive Publication Date: 2016-09-07
西安利科光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This approach not only occupies a large amount of testing machine capacity, but also consumes the manpower and material costs involved in testing machine calibration or monitoring.
And for a long time, the consistency problem of the testing machine has brought large errors to the full measurement value of LED wafer mapping. At the same time, abnormalities in the test data of batch products cannot be discovered until the next round of testing machine monitoring, which not only affects the production cycle. , and will lead to batch rework or even loss of quality downgrade or scrapping

Method used

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  • A kind of LED wafer testing method and testing system
  • A kind of LED wafer testing method and testing system
  • A kind of LED wafer testing method and testing system

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Embodiment Construction

[0059] First, the parameters involved in the implementation steps of the present invention are described as follows:

[0060] WL.offset: wavelength correction function after differentiation;

[0061] IV.gain: light intensity correction function after differentiation;

[0062] WL.std: The wavelength value of the sampled die when the LED wafer to be tested is sampled by the standard sampler;

[0063] IV.std: The light intensity value of the die to be tested when the LED wafer to be tested is sampled by the standard sampler;

[0064] WL.smap: The wavelength value of the random test die tested by the Mapping full test machine;

[0065] IV.smap: sample the light intensity value of the die tested by the Mapping full measuring machine;

[0066] WL.map: the initial wavelength value of the LED wafer to be tested in the Mapping full test machine;

[0067] IV.map: The initial light intensity value of the LED wafer to be tested in the Mapping full test machine;

[0068] WL (final): The final wavelength...

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Abstract

The invention provides a test method and a test system for an LED wafer. The test system includes a standard spot-test machine, an LED wafer scintigram template unit, a standard spot-test machine scintigram template setting unit, a standard spot-test machine cover-die test unit, a spot-test standard data file unit, a to-be-tested LED wafer correction function unit, a monitoring unit and an analyzing processing unit, which are connected sequentially. A Mapping full-test machine, the LED wafer scintigram template unit, a Mapping full-test machine scintigram template setting unit, a Mapping full-test cover machine cover-die test unit and a Mapping full-test data temporary file unit, which are sequentially connected, are connected with a Mapping full-test data standard file unit sequentially. The Mapping full-test machine cover-die test unit is connected with the to-be-tested LED wafer correction function unit through a spot-test grain Mapping data file unit. The monitoring unit is connected with the Mapping full-test data standard file unit. The test method and test system for the LED wafer derates personnel and material costs related with Mapping full-test machine correction and monitoring and at the same time, improves machine productivity use rate and reduces the manufacturing cost of the LED wafer.

Description

Technical field [0001] The invention belongs to the field of LED chip manufacturing, and particularly relates to an LED wafer test method and test system. Background technique [0002] The optical parameters such as wavelength and light intensity of LED wafers are consistent with the test values ​​of each Mapping full measuring machine. The frequent calibration and monitoring workload of the Mapping full measuring machine and the hysteresis of abnormal monitoring have always been LED chip manufacturers. One of the difficulties. At present, the common practice is to use LED standard samples (LED standard chip or standard package device) to calibrate or monitor the LED wafer tester one by one at intervals of several batches or a certain period to confirm the difference between the Mapping full test machine and the standard test machine. When the consistency meets the machine control requirements, the LED wafer on-board machine scan and the full Mapping test of photoelectric parame...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66H01L33/00
CPCH01L22/12H01L22/14H01L22/20
Inventor 赖余盟陈起伟周立业缪炳有李斌
Owner 西安利科光电科技有限公司
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