Light trapping structure for thin film solar cell and manufacturing method thereof
A technology for a solar cell and a light trapping structure, which is applied in the field of solar cells, can solve the problems of limited light trapping effect and complicated processing of the light trapping structure, and achieves the effects of simple structure, wide application range and strong light trapping ability.
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Embodiment 2
[0043] Embodiment 2 of the present invention is a light-trapping structure with a microlens diameter of 400 μm, a focal length of 2 mm in the base material, and a lens center spacing of 600 μm. The material of the microlens is plastic, and the base thickness is 2 mm.
[0044] The processing steps of the light trapping structure are:
[0045] (1) Make a microlens array on a plastic substrate with a thickness of 2 mm by hot pressing. The diameter of the microlens array is 400 μm, the focal length in the plastic substrate is 2 mm, and the lens center spacing is 600 μm;
[0046] (2) Coating a layer of negative photoresist with a thickness of 1um on the lower surface of the microlens substrate and pre-baking;
[0047] (3) Use a 365nm ultraviolet exposure machine to irradiate the upper surface of the microlens array to expose the negative photoresist at the focus of the microlens;
[0048] (4) After the exposed negative photoresist is developed, a dot matrix photoresist pattern cor...
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