Multilayer ceramic substrate and manufacturing method thereof

一种多层陶瓷、基板的技术，应用在多层电路制造、制造测量仪器、印刷电路制造等方向，能够解决连接部面积变小、电阻膜与过孔导体连接可靠性下降等问题，达到优异电阻特性、牢固连接强度、小连接面积的效果
CN103650648BActive Publication Date: 2017-06-09MURATA MFG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
MURATA MFG CO LTD
Publication Date
2017-06-09

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Abstract

The present invention provides a multilayer ceramic substrate capable of achieving ultra-low resistance below 100mΩ with excellent TCR characteristics, and even if a structure in which a resistive film is drawn out by a via-hole conductor is adopted, the resistance film and the via-hole conductor can be connected between the resistive film and the via-hole conductor. Get excellent connection reliability. A multilayer ceramic substrate (1) has a ceramic domain (3) composed of a plurality of laminated ceramic layers (2), and a resistor ( 4), and lead-out via conductors (9, 10) formed to penetrate the ceramic layer (2) in the thickness direction and to connect the first end portion (11) to the resistance film (5). Both the resistive film and the lead-out via-hole conductor contain Ni and Cu, which constitute the alloy resistance material, and the concentration of the Ni component in the lead-out via-hole conductor has a higher concentration than that in the first end (11) connected to the resistive film (5). An inclined structure that is higher and gradually becomes lower from the first end portion (11) to the opposite second end portion (12) side.
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Description

technical field

[0001] The invention relates to a multilayer ceramic substrate and a manufacturing method thereof, in particular to a multilayer ceramic substrate with a built-in resistance film and a manufacturing method thereof. Background technique

[0002] For example, in the measurement of the remaining battery level in the remaining battery level detection circuit, an ultra-low resistance of 100mΩ or less is required for current detection resistors. In addition, the resistor for current detection is required to have a TCR (temperature coefficient of resistance) of, for example, less than 100 ppm / °C.

[0003] For example, Japanese Patent Application Laid-Open No. 2004-356306 (Patent Document 1) discloses a ceramic substrate with resistance formed by firing a resistor body paste simultaneously with a ceramic substrate. In Patent Document 1, for example, a paste mainly composed of ruthenium oxide is used as a resistor paste. However, in the case of a ruthenium oxide-bas...

Claims

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