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Transportation vehicle and AMHS

A technology for conveying vehicles and car bodies, which is applied in the direction of conveyor objects, conveyor control devices, transportation and packaging, etc. It can solve the problems of reducing efficiency and personal injury of transport personnel, so as to improve safety and reliability and avoid collisions between two vehicles Effect

Inactive Publication Date: 2014-03-26
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, manual transportation is still carried by manpower, which will not only reduce the efficiency, but also have the possibility of personal injury of the transportation personnel.

Method used

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  • Transportation vehicle and AMHS
  • Transportation vehicle and AMHS

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0017] see figure 2 , figure 2 A schematic diagram of the structural modules of the transport vehicle in the first embodiment is shown, the transport vehicle includes a vehicle body 11, wheels 12 suspended on rails, a lifting mechanism 13, a silicon wafer cassette pick-and-place mechanism 14 and a control unit 15, wherein the Also be provided with short-distance signal transmitter 21 and short-distance signal receiver 22 in the vehicle body 11 of delivery vehicle, this short-distance signal transmitter 21 is used for sending signal to the delivery vehicle around it, and this short-distance signal receiver 22 is used for To receive the signals sent by the transport vehicles around it, the short-distance signal receiver 22 is connected to the control unit 15 , and the control unit 15 is connected to the brake unit 16 and the acceleration unit 17 of the wheel 12 .

[0018] In this embodiment, the short-distance signal transmitter is an infrared transmitter with a transmitting ...

no. 2 example

[0020] In this embodiment, the AMHS system has a plurality of machines, a track structure, at least one transport vehicle of the first embodiment, and a general control unit.

[0021] Wherein, the transport vehicle of this embodiment is respectively provided with a pair of infrared transmitters and infrared receivers on the front and rear sides of its body. When the main control unit fails, there is a transport vehicle B on the driving path of the transport vehicle A that is picking up the silicon wafer box. When the transport vehicle A approaches the transport vehicle B, and the infrared receiver on the front of the transport vehicle A receives the The signal sent by the infrared transmitter of B, the control unit of the transport vehicle A immediately drives the brake unit to perform the braking action to avoid collision with the transport vehicle B.

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PUM

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Abstract

The invention discloses a transportation vehicle for an AMHS. The transportation vehicle is characterized in that a short-distance signal transmitter and a short-distance signal receiver are arranged in a vehicle body, the short-distance signal receiver is in signal connection with a control unit, and the control unit is in signal connection with a wheel brake unit and / or a wheel accelerating unit. According to the transportation vehicle, due to the fact that the short-distance signal transmitter and the short-distance signal receiver are arranged, when other transportation vehicles nearby approach, signals emitted by the other transportation vehicles can be received and transmitted to the control unit of the transportation vehicle, the control unit drives the brake unit or the accelerating unit to do brake motions or to calculate the distance change between two vehicles to do corresponding motions, and consequently collision of the two vehicles can be effectively avoided and the safety and reliability of the AMHS can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuit material conveying machines, in particular to a conveying vehicle and an AMHS system. Background technique [0002] With the development of semiconductor technology, 300mm silicon wafers have gradually replaced 200mm silicon wafers and become the mainstream, and the weight of each silicon wafer box loaded with silicon wafers has also changed from about 4 kg to about 9 kg. Therefore, manual transport is still carried by manpower, which not only reduces efficiency, but also has the possibility of personal injury of the transporter. At the same time, semiconductor manufacturing has increasingly stringent requirements on plant utilization and production cycle, and the importance of Automated Material Handling Systems (AMHS) as a link to transport silicon wafers between various manufacturing modules is also increasing. stand out. [0003] The existing AMHS system uses multipl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G43/02
Inventor 唐国强
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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