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One-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure and technological method

A technology of bump structure and metal plating, which is applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve the problems of lack of system functions in metal lead frames, and achieve the effects of improving heat dissipation, reducing costs, and small size

Active Publication Date: 2014-03-26
JCET GROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to overcome the above-mentioned disadvantages, and to provide a bump structure and process method of one-time etching and then metal-plated metal frame subtraction embedded chips, which can solve the problem of lack of system functions in traditional metal lead frames

Method used

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  • One-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure and technological method
  • One-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure and technological method
  • One-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure and technological method

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Effect test

Embodiment Construction

[0063] The process method of the present invention is to etch first and then plate the metal frame subtractively to embed the bump structure of the chip as follows:

[0064] Step 1. Take the metal substrate

[0065] see figure 1 , Take a piece of metal substrate with appropriate thickness, the material of this plate is mainly metal material, and the material of metal material can be copper, iron, galvanized, stainless steel, aluminum or metal that can achieve conductive function Material or non-all-metal material, etc., the choice of thickness can be selected according to product characteristics.

[0066] Step 2. Paste photoresist film

[0067] see figure 2 , A photoresist film that can be exposed and developed is pasted on the front and back of the metal substrate to protect the subsequent etching process. The photoresist film can be a dry photoresist film or a wet photoresist film.

[0068] Step 3. Remove part of the photoresist film from the surface of the metal substra...

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PUM

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Abstract

The invention relates to a one-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure and a technological method. The one-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure is characterized in that a metal substrate frame is included, a paddle and pins are arranged in the metal substrate frame, the pins are of a step shape, the front face of the paddle and the front faces of the pins are aligned with the front face of the metal substrate frame, the back faces of the pins are aligned with the back face of the metal substrate frame, the back face of the paddle is aligned with the step faces of the pins, metal layers are arranged on the step faces of the pins, a chip is arranged on the back face of the paddle through conducting or non-conducting adhesion substances, the front face of the chip is connected with the surfaces of the metal layers on the step faces of the pins through metal wires, plastic packaging materials wrap the paddle, the pins, the chip and the metal wires, and anti oxidation layers are plated on or organic solderability preservative (OSP) wraps the front face of the paddle, the front faces and the back faces of the pins and the surface of the metal substrate frame. Metal balls are arranged on the back faces of the pins. The one-time eroding-before-plating metal frame subtraction embedded chip normally-arranged salient point structure has the advantages of being capable of solving the problem that the function and the application performance of a metal wire frame are restricted due to the fact that objects cannot be buried in the thickness of the traditional metal wire frame.

Description

technical field [0001] The invention relates to a structure and a process method of a positive mounting bump structure and a process method of a metal frame subtraction embedded chip after etching first and then plating. It belongs to the technical field of semiconductor packaging. Background technique [0002] There are two main types of conventional four-sided flat leadless metal leadframe structures: [0003] One is the four-sided flat no-lead package (QFN) lead frame. The lead frame of this structure is composed of a copper metal frame and a high temperature resistant adhesive film (such as Figure 16 shown). [0004] One is the pre-encapsulated quad flat no-leads (pQFN) leadframe, the leadframe structure of this structure includes the lead and the base island, and the etched area between the lead and the base island is filled with plastic encapsulant (such as Figure 17 shown). [0005] The above conventional metal lead frame has the following disadvantages: [0006...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/495H01L23/31H01L21/56H01L21/60
CPCH01L2224/48091H01L2224/73265H01L2924/00014
Inventor 梁志忠梁新夫王亚琴
Owner JCET GROUP CO LTD
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