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Thermal conductivity and thermal diffusivity sensor based on MEMS double heater

A technology of thermal diffusivity and heaters, which is applied in the direction of instruments, scientific instruments, and thermal development of materials, etc., can solve the problems of increasing measurement errors, and achieve the effects of reducing requirements, reducing influence, and small temperature rise

Active Publication Date: 2014-04-02
明石创新(烟台)微纳传感技术研究院有限公司
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Problems solved by technology

For conductive liquids, thin insulating layers increase measurement errors

Method used

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  • Thermal conductivity and thermal diffusivity sensor based on MEMS double heater
  • Thermal conductivity and thermal diffusivity sensor based on MEMS double heater
  • Thermal conductivity and thermal diffusivity sensor based on MEMS double heater

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Embodiment Construction

[0028] The structure and working principle of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] refer to figure 1 , a thermal conductivity and thermal diffusivity sensor based on MEMS dual heaters, comprising a substrate 1, a heater 6 arranged in the center of the upper surface of the substrate 1, a pad 5 positioned next to the heater 6 on the upper surface of the substrate 1, and heating The device 6 is connected, the insulating layer film 2 is covered on the heater 6, the pad 5 and the substrate 1, the insulating layer film 2 is provided with a cavity wall 3, and the cavity wall 3 and the insulating layer film 2 form a cavity structure in which the The liquid 4 is measured, the heater 6 is used as a temperature sensor at the same time, and the copper block 7 is pasted on the lower surface of the substrate 1 as a heat sink.

[0030] Such as Figure 2-a and 2-b As shown, the heater 6 is a metal strip with a multi...

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Abstract

The invention relates to a thermal conductivity and thermal diffusivity sensor based on a MEMS double heater. The thermal conductivity and thermal diffusivity sensor comprises a substrate, wherein a heater is arranged on the center of the upper surface of the substrate, welding disks are positioned on the both sides of the heater on the upper surface of the substrate and are connected with the heater, an insulation layer film covers on heater, the welding disks and the substrate, and is provided with chamber walls, the chamber walls and the insulation layer film form a cavity structure filled with a liquid requiring detection, the heater is concurrently adopted as a temperature sensor, is a multi-folding structure metal belt, is formed by connecting more than two parallel metal belts with the same width and the same distance in series, and is divided into the narrow heater and the wide heater, and a reference liquid with a known thermal conductivity and a known thermal diffusivity is adopted as the liquid requiring detection to reversely deduce the thermal conductivity and the thermal diffusivity of the substrate so as to improve measurement precision.

Description

technical field [0001] The invention relates to the technical field of thermal diffusivity sensors, in particular to a thermal conductivity and thermal diffusivity sensor based on MEMS dual heaters. Background technique [0002] Thermal conductivity and thermal diffusivity are important thermophysical properties of substances. Many countries in the world have conducted in-depth research on the measurement and application of thermal conductivity and thermal diffusivity. In recent years, with the rapid development of high-tech in the fields of nanotechnology, microelectromechanical systems, low-dimensional materials, and nanobiomedicine, many research objects have entered the submicron-nanoscale, and the demand for measurement of small-volume liquid samples has increased. [0003] Commonly used liquid thermal conductivity and thermal diffusivity measurement methods include steady-state method and transient method. The steady-state method takes a long time to measure, the fluid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N25/20G01N25/00
Inventor 赵立波陈闯蒋庄德赵玉龙王苑
Owner 明石创新(烟台)微纳传感技术研究院有限公司
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