Holographic grating exposed interference fringe phase shifting and locking device

A technology of interference fringes and phase shifting, applied in the field of spectroscopy, can solve the problems of limited fringe jitter suppression effect, slow response speed of linear array CCD, etc., and achieve the effect of improving the production technology and process level

Active Publication Date: 2014-04-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

This method directly detects the interference fringes, which can effectively stabilize the interference fringes in the exposure area. However, due to the slow response speed...

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  • Holographic grating exposed interference fringe phase shifting and locking device
  • Holographic grating exposed interference fringe phase shifting and locking device

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specific Embodiment approach 1

[0013] Specific implementation mode 1. Combination figure 1 with figure 2 Describe this embodiment, the holographic grating exposure interference fringe phase shift and locking device. The device includes:

[0014] The laser beam emitted by the light source laser 1 passes through the first fixed-frequency acousto-optic modulator 2 , and emits a 0-order beam and a 1-order diffracted beam. The 0-order beam passes through the first beam splitter 4 and is split into two coherent beams. After a beam of coherent beam passes through the second plane reflector 5 and the acousto-optic frequency shifter 7, the emitted first-order diffracted light is the frequency-shifted interference beam 9, and the transmitted beam is expanded by the first beam expander 13 after passing through the second beam splitter 11. The beam is then irradiated on the grating substrate 15 , and the reflected beam passes through the fifth beam splitter 19 and then enters the first phase measurement receiver 21 ....

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Abstract

The invention discloses a holographic grating exposed interference fringe phase shifting and locking device and belongs to a device related in the technical field of spectrums. A technical scheme is that the holographic grating exposed interference fringe phase shifting and locking device comprises a light source laser device, a plane mirror, a beam-splitting plate, an acousto-optic frequency shifter, a fixed-frequency acousto-optic modulator, an optical grating substrate, phase measuring receivers and a controller. After light source laser is split, two light beams are subjected to frequency shifting by the fixed-frequency acousto-optic modulator and the acousto-optic frequency shifter, so that part of emergent light is subjected to interference to form exposed interference fringes, and the other part of the emergent light respectively enters the two phase measuring receivers to obtain the phase difference of coherent light beams by adopting a heterodyne method; the controller controls the drive frequency of the acousto-optic frequency shifter to keep the phase difference constant. The device disclosed by the invention can accurately carry out effective movement control and phase locking on phases of the holographic-grating exposed interference fringes, and has significance in improving a holographic grating manufacturing technology and the process level.

Description

technical field [0001] The invention relates to the field of spectrum technology, in particular to a device for phase shifting and locking of holographic grating exposure interference fringes. Background technique [0002] Holographic grating is an important optical component, which has a wide range of applications in many fields such as spectroscopic instruments, measurement, optical information processing and communication. The exposure process is one of the most important process links in the production process of holographic grating. During the exposure process of the holographic grating, the exposure interference fringes are obtained by interfering with two beams of coherent light, and the interference fringes are irradiated on the grating substrate coated with photoresist, and the holographic grating mask can be obtained by recording the interference fringes. A qualified holographic grating mask It is the basis of the subsequent process and directly determines whether...

Claims

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Application Information

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IPC IPC(8): G03F7/20G02B5/18
Inventor 宋莹巴音贺希格姜珊李文昊潘明忠
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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