Polycrystalline silicon ingot casting process
A technology for polysilicon and ingot casting is applied in the field of polysilicon ingot casting technology, which can solve the problems affecting the quality and yield of ingot products, inability to accurately control the crystal growth process, and affecting yield, etc., so as to prevent the quality of polysilicon ingots from declining and improve The effect of crystal growth quality and easy operation
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Embodiment 1
[0054] Such as figure 1 The shown polysilicon ingot casting process includes the following steps:
[0055] Step 1. Preheating: Preheat the silicon material contained in the crucible with an ingot furnace, and gradually increase the heating temperature of the ingot furnace to T1; the preheating time is 7h, where T1=1175°C.
[0056] In this embodiment, the ingot furnace is a G5 ingot furnace. In addition, the ingot furnace is specifically a G5 ingot furnace produced by Zhejiang Jingsheng Electromechanical Co., Ltd. The crucible is a quartz crucible and it is a G5 crucible, and the produced polysilicon ingot is a G5 ingot.
[0057] In actual use, the charging amount of the quartz crucible is about 600 kg.
[0058] In this embodiment, the charging amount of the quartz crucible is 560 kg. In actual use, the charging amount of the quartz crucible can be adjusted according to specific needs.
[0059] In this embodiment, during the preheating process in step 1, the heating power of the ingot...
Embodiment 2
[0118] In this embodiment, the difference from embodiment 1 is: the preheating time in step 1 is 6h and T1=1185°C, P1=80kW; in step 2, T5=1560°C, t=18min, Q1=650mbar; step 1. The medium holding time is 0.4h; from step 2 to step 5, T2=1210℃, and the heating time is 0.4h; in step 6 T3=1460℃ and the heating time is 3.5h; in step 7, T4=1510℃ and The heating time is 3.5h; in the 8th step, T5=1560℃ and the heating time is 3.5h; the 9th step is 3.5h; the 10th step is 4h.
[0119] In this embodiment, the process of heating and pressurizing in steps 2 to 5 is as follows:
[0120] The second step, the first step is to increase: the heating temperature of the ingot furnace is increased from 1185°C to 1190°C, and the heating time is 5 min.
[0121] Step 3 and Step 2: Increase the heating temperature of the ingot furnace from 1190°C to 1195°C, and the heating time is 5 minutes.
[0122] Step 4 and Step 3: Raise the heating temperature of the ingot furnace from 1195°C to 1205°C, and the heating ti...
Embodiment 3
[0130] In this embodiment, the difference from embodiment 1 is: the preheating time in step one is 10h and T1=1165°C, P1=70kW; in step two, T5=1540°C, t=22min, Q1=550mbar; step 1. The medium holding time is 0.6h; from step 2 to step 5, T2=1190℃ and the heating time is 0.6h; in step 6 T3=1440℃ and the heating time is 4.5h; in step 7 T4=1490℃ and The heating time is 4.5h; in the 8th step, T5=1540℃ and the heating time is 4.5h; the 9th step is 4.5h; the 10th step is 8h.
[0131] In this embodiment, the process of heating and pressurizing in steps 2 to 5 is as follows:
[0132] The second step, the first step is to increase: increase the heating temperature of the ingot furnace from 1165°C to 1172°C, and the heating time is 9 minutes.
[0133] Step 3 and Step 2: Increase the heating temperature of the ingot furnace from 1172°C to 1178°C, and the heating time is 8 minutes.
[0134] Step 4 and Step 3: Increase the heating temperature of the ingot furnace from 1178°C to 1183°C, and the heat...
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