Polycrystalline silicon ingot casting process

A technology for polysilicon and ingot casting is applied in the field of polysilicon ingot casting technology, which can solve the problems affecting the quality and yield of ingot products, inability to accurately control the crystal growth process, and affecting yield, etc., so as to prevent the quality of polysilicon ingots from declining and improve The effect of crystal growth quality and easy operation

Inactive Publication Date: 2014-04-23
XIAN HUAJING ELECTRONICS TECH
View PDF8 Cites 20 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When actually casting polysilicon ingots, the control of the crystal growth process directly affects the quality and yield of the finished ingot. If the crystal growth is stable, a higher minority carrier lifetime and better yield can be obtained; if the crystal growth process is not well controlled, May caus

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Polycrystalline silicon ingot casting process
  • Polycrystalline silicon ingot casting process

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0053] Example 1

[0054] Such as figure 1 The shown polysilicon ingot casting process includes the following steps:

[0055] Step 1. Preheating: Preheat the silicon material contained in the crucible with an ingot furnace, and gradually increase the heating temperature of the ingot furnace to T1; the preheating time is 7h, where T1=1175°C.

[0056] In this embodiment, the ingot furnace is a G5 ingot furnace. In addition, the ingot furnace is specifically a G5 ingot furnace produced by Zhejiang Jingsheng Electromechanical Co., Ltd. The crucible is a quartz crucible and it is a G5 crucible, and the produced polysilicon ingot is a G5 ingot.

[0057] In actual use, the charging amount of the quartz crucible is about 600 kg.

[0058] In this embodiment, the charging amount of the quartz crucible is 560 kg. In actual use, the charging amount of the quartz crucible can be adjusted according to specific needs.

[0059] In this embodiment, during the preheating process in step 1, the heating ...

Example Embodiment

[0117] Example 2

[0118] In this embodiment, the difference from embodiment 1 is: the preheating time in step 1 is 6h and T1=1185°C, P1=80kW; in step 2, T5=1560°C, t=18min, Q1=650mbar; step 1. The medium holding time is 0.4h; from step 2 to step 5, T2=1210℃, and the heating time is 0.4h; in step 6 T3=1460℃ and the heating time is 3.5h; in step 7, T4=1510℃ and The heating time is 3.5h; in the 8th step, T5=1560℃ and the heating time is 3.5h; the 9th step is 3.5h; the 10th step is 4h.

[0119] In this embodiment, the process of heating and pressurizing in steps 2 to 5 is as follows:

[0120] The second step, the first step is to increase: the heating temperature of the ingot furnace is increased from 1185°C to 1190°C, and the heating time is 5 min.

[0121] Step 3 and Step 2: Increase the heating temperature of the ingot furnace from 1190°C to 1195°C, and the heating time is 5 minutes.

[0122] Step 4 and Step 3: Raise the heating temperature of the ingot furnace from 1195°C to 1205°C, ...

Example Embodiment

[0129] Example 3

[0130] In this embodiment, the difference from embodiment 1 is: the preheating time in step one is 10h and T1=1165°C, P1=70kW; in step two, T5=1540°C, t=22min, Q1=550mbar; step 1. The medium holding time is 0.6h; from step 2 to step 5, T2=1190℃ and the heating time is 0.6h; in step 6 T3=1440℃ and the heating time is 4.5h; in step 7 T4=1490℃ and The heating time is 4.5h; in the 8th step, T5=1540℃ and the heating time is 4.5h; the 9th step is 4.5h; the 10th step is 8h.

[0131] In this embodiment, the process of heating and pressurizing in steps 2 to 5 is as follows:

[0132] The second step, the first step is to increase: increase the heating temperature of the ingot furnace from 1165°C to 1172°C, and the heating time is 9 minutes.

[0133] Step 3 and Step 2: Increase the heating temperature of the ingot furnace from 1172°C to 1178°C, and the heating time is 8 minutes.

[0134] Step 4 and Step 3: Increase the heating temperature of the ingot furnace from 1178°C to 11...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Life expectancyaaaaaaaaaa
Life expectancyaaaaaaaaaa
Life expectancyaaaaaaaaaa
Login to view more

Abstract

The invention discloses a polycrystalline silicon ingot casting process. The process comprises the following steps: 1, preheating; 2, melting; 3, growing crystal: the temperature is controlled to T6 and is preserved for 1h, and T6=1420 DEG C; the hoisting height of a heat insulation cage is 90mm; the temperature is controlled to T6 and is preserved for 2h, and the hoisting height of the heat insulation cage is not changed; the temperature is controlled to T6 and is preserved for 3h, and the hoisting height of the heat insulation cage is 110mm; the temperature is gradually lowered from T6 to T7, the temperature lowering time is 7-9h, and the hoisting height of the heat insulation cage is 210mm; T7=1405 DEG C; the temperature is controlled to T7 and is preserved for 7-9h, and the hoisting height of the heat insulation cage is not changed; the temperature is controlled to T7 and is preserved for 7-9h, and the hoisting height of the heat insulation cage is not changed; the temperature is gradually lowered from T7 to T8, and the hoisting height of the heat insulation cage is not changed; T8=1395 DEG C; 4, annealing and cooling. The polycrystalline silicon ingot casting process has the advantages of simple steps, reasonable design, convenience in realization, easiness in grasp and good using effect and can reasonably control the ingot casting crystal growth process.

Description

Technical field [0001] The invention belongs to the technical field of polycrystalline silicon ingot casting, and particularly relates to a polycrystalline silicon ingot casting process. Background technique [0002] Photovoltaic power generation is currently one of the most important clean energy sources and has great development potential. The key factors restricting the development of the photovoltaic industry are the low photoelectric conversion efficiency on the one hand, and the high cost on the other. Photovoltaic silicon wafers are the basic material for the production of solar cells and modules. The purity of polysilicon used to produce photovoltaic silicon wafers must be above 6N (that is, the total content of non-silicon impurities is below 1ppm), otherwise the performance of photovoltaic cells will be greatly negatively affected. influences. In recent years, polycrystalline silicon wafer production technology has made significant progress. Polycrystalline ingot cast...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C30B28/06C30B29/06
Inventor 周建华
Owner XIAN HUAJING ELECTRONICS TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products