Electrostatic atomization method for evenly distributing particles
A technology of electrostatic atomization and particle uniformity, applied in liquid spraying equipment, liquid supply devices, spray devices, etc., can solve the problems of low cost, short-circuit particle distribution, unevenness, etc., achieve low cost, speed up volatilization and evaporation, and high promotion Effects with Applied Value
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Embodiment 1
[0044] An electrostatic atomization method for uniform particle distribution, comprising the following steps:
[0045] 1. Select ethanol as the solvent, 0.03g of particles, 30g of solvent, the particles and the solvent are miscible to form a solution. Use an ultrasonic oscillator to perform ultrasonic vibration for 30 minutes to form a well-dispersed suspension.
[0046] 2. Set the flow rate of the micro-injection pump to 1ml / h, draw out the solution and push it to the needle.
[0047] 3. The outer diameter of the needle is 0.35mm, the inner diameter is 0.18mm, and the distance between poles is 20mm. The selected substrate is a silicon wafer with a diameter of 3.5 inches.
[0048] 4. Connect the positive pole of the voltage to the needle, and the substrate to ground. Adjust the voltage from 0 to 5.6kv slowly to form a stable atomization mode. Before forming a stable atomization mode, use the baffle to block the unstable droplets of different sizes formed in the previous mo...
Embodiment 2
[0052] An electrostatic atomization method for uniform particle distribution, comprising the following steps:
[0053] 1. Use isopropanol as the solvent, 0.05g of granules, 30g of solvent, and mix the granules and solvent to form a solution. Ultrasonic vibration for 30min forms a well-dispersed suspension.
[0054] 2. Set the flow rate of the micro-injection pump to 0.5ml / h, draw out the solution and push it to the needle.
[0055] 3. The outer diameter of the needle is 0.35mm, the inner diameter is 0.18mm, and the distance between poles is 20mm. The selected substrate is a silicon wafer with a diameter of 3.5 inches.
[0056] 4. Connect the positive pole of the voltage to the needle, and the substrate to ground. The regulation voltage slowly rises from 0 to 6.28kv to form a stable atomization mode. Before forming a stable atomization mode, use the baffle to block the unstable droplets of different sizes formed in the previous mode, and remove the baffle after the stable m...
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