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Preparation method of niobium target

A niobium target and niobium tube technology, which is applied in the field of niobium target preparation, can solve the problems of unsatisfactory processing cycle, waste, and long hole-making processing cycle, and achieve uniform and fine internal structure, avoid raw material waste, and shorten the hole-making cycle Effect

Active Publication Date: 2014-04-30
NINGXIA ORIENT TANTALUM IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, niobium is a rare refractory metal. Calculated based on the length of the extruded billet of 650mm, if the niobium material is drilled, 80kg will be wasted in the form of shavings; Wasteful, but the processing cycle for hole making is very long. It takes 4 weeks to process a section of blank with a length of 650mm and Φ110-130mm, which cannot meet the processing cycle

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[0025] The embodiment of the present invention discloses a method for preparing a niobium target, which includes the following steps:

[0026] a) Annealing the niobium ingot, and drilling the annealed niobium ingot;

[0027] b) preheating the niobium ingot obtained in step a), and coating glass powder on the surface of the preheated niobium ingot;

[0028] c) heating the niobium ingot obtained in step b), and coating the surface of the heated niobium ingot with glass powder again;

[0029] d) Enlarging the niobium ingot obtained in step c); heating the expanded niobium tube, and extruding the heated niobium tube.

[0030] The present application provides a method for preparing a niobium target, that is, a hole-making method for a niobium target. The present invention makes holes for niobium ingots by combining drilling and reaming, so that the hole making process of niobium targets not only avoids the waste of raw materials but also shortens the processing cycle; Among them...

Embodiment 1

[0042] Step 1. Obtain niobium oxide by aluminothermic reduction of niobium pentoxide, and smelt niobium oxide in a horizontal furnace and an electron beam furnace respectively to obtain a niobium ingot with a diameter of Φ190mm, a length of 410mm, and a chemical composition of Nb≥99.95wt%. ; Then preheat the niobium ingot to 200°C, apply glass powder, then heat the niobium ingot to 400°C, keep it warm for 3 hours, upsetting the niobium ingot axially to 210mm, and stretching to 200×200×290mm, requiring forging The size of the niobium ingot after forging is: Φ200×370mm; then the forged niobium ingot is pickled: HCl:HF:H 2 SO 4 =5:3:2 (volume ratio), pickling time is 10 minutes, remove surface impurities and glass powder, and observe the luster of niobium metal with naked eyes without specks;

[0043] Step 2. Carry out heat treatment to the niobium ingot billet obtained in step 1: the heat treatment temperature is 1000° C., and the holding time is 60 min;

[0044] Step 3. Turn ...

Embodiment 2

[0052] Step 1. Obtain niobium oxide by aluminothermic reduction of niobium pentoxide, and smelt niobium oxide in a horizontal furnace and an electron beam furnace respectively to obtain a niobium ingot with a diameter of 230mm, a length of 380mm, and a chemical composition of Nb≥99.95wt%. ; Preheat the niobium ingot to 240°C, apply glass powder, heat the ingot to 410°C, keep it warm for 3 hours, upsetting the niobium ingot axially to 280mm, and elongate it to 200×200×390mm; finally, niobium ingot forging is required The final size is: Φ190×550mm; then pickling the forged niobium ingot: HCl:HF:H 2 SO 4 =5:3:2 (volume ratio), pickling time is 10 minutes, remove surface impurities and glass powder, and observe the luster of niobium metal with naked eyes without specks;

[0053] Step 2. Carry out heat treatment to the niobium ingot billet obtained in step 1: the heat treatment temperature is 900° C., and the holding time is 100 min;

[0054] Step 3. Turning the outer surface and...

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Abstract

The invention provides a preparation method of a niobium target, which comprises the following steps: a) carrying out annealing treatment on a niobium ingot, and drilling the annealed niobium ingot; b) preheating the niobium ingot obtained in the step a), and coating glass powder on the preheated niobium ingot surface; c) heating the niobium ingot obtained in the step b), and coating glass powder on the heated niobium ingot surface again; and d) reaming the niobium ingot obtained in the step c), heating the niobium tube subjected to hot reaming, and extruding the heated niobium tube. In the niobium target preparation process, the mode combining drilling and reaming is utilized to prepare the hole in the niobium target, thereby avoiding the problem of waste of raw materials due to long-time drilling and shortening the hole preparation period of the niobium target.

Description

technical field [0001] The invention relates to the technical field of metal materials, in particular to a method for preparing a niobium target. Background technique [0002] The target is a special electronic material with high added value, which is used for thin film materials of sputtering cutting-edge technology. According to different application fields, targets mainly include targets for semiconductor applications, targets for recording media, targets for display films, advanced touch screens and displays, optical targets, and superconducting targets. Among them, targets for semiconductor applications, targets for recording media and display targets are the three largest types of targets in the market. Target shapes are rectangular, square, cylindrical and irregular. Cuboid, cube and cylinder shaped targets are solid. During the sputtering process, circular permanent magnets establish a circular magnetic field on the surface of the target and form an etching area on...

Claims

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Application Information

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IPC IPC(8): C23C14/35B23P15/00
Inventor 汪凯李桂鹏张国军张春恒李兆博同磊郭从喜孙伟
Owner NINGXIA ORIENT TANTALUM IND
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