Three-dimensional microscale measuring device and method based on five-core fiber grating

Abstract

The invention provides a three-dimensional microscale measuring device and method based on a five-core fiber grating, and belongs to the technical field of precision instrument manufacturing and measurement. The device comprises a broadband light source, an optical spectrum analyzer, an optical circulator, a control computer, a multi-way optical switch and an external reference grating. The multi-way optical switch is communicated with a five-core fiber fan-out device through five single mode fibers. One end of a five-core fiber is connected to the five-core fiber fan-out device. A five-core fiber grating probe is fixedly installed at the other end of the five-core fiber through a probe clamp holder. The five-core fiber and the five-core fiber grating probe are connected to form a closed circuit. According to the method, the multi-way optical switch is controlled by the control computer to switch optical paths, the optical spectrum analyzer is used for measuring reflectance spectra of the fiber grating, and three-dimensional microscale measuring without temperature coupling is realized through a differential data processing algorithm. The three-dimensional microscale measuring device and method based on the five-core fiber grating have the advantages that accuracy is high, contact force is small, the device and method are not affected by the shadowing effect, and the service life of the probe is long.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, and in particular relates to a three-dimensional microscale measurement device and method based on a five-core optical fiber grating. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitations of the space scale and the shadowing effect of the micro-components to be measured, as well as the influence of the measurement contact force, it is difficult to realize the precise measurement of the micro-component scale, especially the measurement of the depth of the micro-cavity components is difficult to increase, which has become a constraint to the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement ...

AI Technical Summary

Problems solved by technology

[0009] 1. It is difficult to further improve the touch displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve the resolution of the touch displacement.

The fiber grating probe based on FBG Bending's micropore size measurement method cannot apply the main micro-touch displacement effect to the fiber grating, and the sensing signal converted into spectral information is weak, and the resolution of the system is very low

[0010] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The probe of the micropore size measurement method based on FBGBending has consistent performance in all directions, and there is coupling in the radial two-dimensional touch displacement sensing, and it cannot be separated, resulting in a large error in the two-dimensional measurement, and the radial two-dimensional cannot be realized. Accurate measurement of touch displacement

[0012] 4. Does not have the decoupling capability of radial and axial detection

The detection methods mentioned above either do not have the ability of axial detection or the decoupling ability of radial and axial detection. When performing micro-scale measurement, the measurement steps are complicated and the measurement efficiency is low.

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