Method and system for testing secondary electron yield of star-used dielectric materials
A technology of secondary electron emission and dielectric materials, applied in the field of measurement, can solve the problems of long time, large electron current, low test efficiency, etc., and achieve the effect of reducing impact, high test accuracy and improving test efficiency
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Embodiment 1
[0032] The invention provides a test system for the secondary electron emission coefficient of a dielectric material for a star, such as figure 1 As shown, it is a top view of the test sample platform, including:
[0033] Sample table 10, for placing at least one test sample made of a dielectric material;
[0034] A vacuum system 15, used to evacuate the sample stage 10 into a vacuum;
[0035] Electron gun 1, used for emitting high-energy electrons to irradiate test samples;
[0036] The incident electron test Faraday cage 3, the incident electron test Faraday cage 3 is placed on the sample stage, placed under the high-energy electron radiation generated by the electron gun, and connected to the first micro ammeter 13 for testing the electron gun The incident electron current intensity of the emitted energetic electrons;
[0037] The secondary electron collector 4 is placed above the test sample and connected to the second micro ammeter 14 for testing the secondary electron...
Embodiment 2
[0050] The present invention also provides a method for testing the secondary electron emission coefficient of a star dielectric material, comprising the steps of:
[0051] S21: placing the test sample on the sample stage, and using a vacuum system to evacuate the test sample stage;
[0052] S22: Turn on the electron gun to generate high-energy electrons;
[0053] S23: The electron gun emits a single pulsed electron beam, and the emitted electron beam irradiates the incident electron test Faraday cage placed on the sample stage, and a single pulse is measured by the first microcurrent meter connected to the incident electron test Faraday cage The incident current intensity of the electron beam;
[0054] S24: Rotate the sample stage, place any test sample under a single pulsed electron beam irradiation, using the secondary electron collector placed above the test sample and the second microcurrent connected to the secondary electron collector The meter measures the secondary ...
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