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Cerium and terbium codoped borophosphate light-emitting film as well as preparation method and application of cerium and terbium codoped borophosphate light-emitting film

A technology of borophosphate and luminescent thin films, applied in the field of thin film electroluminescent devices and their preparation

Inactive Publication Date: 2014-05-21
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, cerium and terbium co-doped borophosphate luminescent films that can be applied to thin film electroluminescent displays have not been reported yet.

Method used

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  • Cerium and terbium codoped borophosphate light-emitting film as well as preparation method and application of cerium and terbium codoped borophosphate light-emitting film
  • Cerium and terbium codoped borophosphate light-emitting film as well as preparation method and application of cerium and terbium codoped borophosphate light-emitting film
  • Cerium and terbium codoped borophosphate light-emitting film as well as preparation method and application of cerium and terbium codoped borophosphate light-emitting film

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preparation example Construction

[0031] The preparation method of the above-mentioned cerium-terbium co-doped borophosphate luminescent film comprises the following steps:

[0032] Step S11, loading the substrate into the reaction chamber of the chemical vapor deposition equipment, and setting the vacuum degree of the reaction chamber to 1.0×10 -2 pa~1.0×10 -3 pa.

[0033] In this embodiment, the substrate is indium tin oxide glass (ITO). It can be understood that in other embodiments, it can also be fluorine-doped tin oxide glass (FTO), aluminum-doped zinc oxide (AZO) or indium-doped glass. zinc oxide (IZO); the substrate was ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber.

[0034] Preferably, the vacuum degree of the reaction chamber is 4.0×10 -3 Pa.

[0035] Step S12 , heat-treating the substrate at 600° C. to 800° C. for 10 minutes to 30 minutes.

[0036] Step S13, adjusting the temper...

Embodiment 1

[0068] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 4.0×10 -3 pa; Then the substrate is heat treated at 700°C for 20 minutes, and then the temperature is lowered to 500°C. Turn on the rotating motor, adjust the rotating speed of the substrate holder to be 300 rpm, and feed the organic source dicyclopentadiene magnesium (Mg(C 5 h 5 ) 2 ), borane (BH 3 ), phosphine (PH 3 ), cerium tetramethylheptanedionate (Ce(DPM) 4 ) and tris(2,2,6,6-tetramethyl-3,5-heptanedionate) terbium (Tb(DPM) 3 ) in a molar ratio of 3:1:3:0.02:0.04, the carrier gas is argon, and the flow rate of argon is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 120 sccm, and the deposition of the film is started. The thickness of the f...

Embodiment 2

[0074] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 pa; Then the substrate is heat-treated at 700°C for 10 minutes, and then the temperature is lowered to 250°C. Turn on the rotating motor, adjust the rotating speed of the substrate holder to be 50 rev / min, feed organic source dicyclopentadiene magnesium (Mg(C 5 h 5 ) 2 ), borane (BH 3 ), phosphine (PH 3 ), cerium tetramethylheptanedionate (Ce(DPM) 4 ) and tris(2,2,6,6-tetramethyl-3,5-heptanedionate) terbium (Tb(DPM) 3 ) in a molar ratio of 3:1:3:0.05:0.01, the carrier gas is argon, and the flow rate of argon is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 10 sccm, and the deposition of the film is started. The thickness of the film is...

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Abstract

The invention relates to a cerium and terbium codoped borophosphate light-emitting film with the chemical formula of Me3BP3O12: xCe<3+>, yTb<3+>, wherein 0.01<=x<=0.05, 0.01<=y<=0.08, Me3BP3O12 is a substrate, the cerium element and the terbium element are active elements, and Me is Mg, Ca, Sr or Ba. The cerium and terbium codoped borophosphate light-emitting film has a rather strong light emitting peak within the wavelength regions of 490nm and 510nm in an electroluminescence spectrum (EL), and can be applied to a film electroluminescent display. The invention also provides a preparation method and application of the cerium and terbium codoped borophosphate light-emitting film.

Description

【Technical field】 [0001] The invention relates to a cerium-terbium co-doped borophosphate luminescent film and a preparation method thereof, a thin-film electroluminescent device and a preparation method thereof. 【Background technique】 [0002] Thin film electroluminescent display (TFELD) has attracted widespread attention and developed rapidly due to its advantages such as active light emission, full solid state, impact resistance, fast response, large viewing angle, wide application temperature, and simple process. At present, the research of color and even full-color TFELD and the development of multi-band luminescent films are the development direction of this subject. However, cerium and terbium co-doped borophosphate luminescent films that can be applied to thin film electroluminescent displays have not been reported yet. 【Content of invention】 [0003] Based on this, it is necessary to provide a cerium-terbium co-doped borophosphate light-emitting thin film applica...

Claims

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Application Information

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IPC IPC(8): C09K11/71H01L33/50H01L33/00
Inventor 周明杰王平陈吉星黄辉
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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