Single-fiber-coupled spherical microscale sensor based on polarization state detection

Abstract

The invention provides a single-optical fiber coupling ball microscale sensor based on polarization state detection and belongs to the technology of manufacturing and measurement of precise instruments. The single-optical fiber coupling ball microscale sensor comprises a laser, a semi-transparent semi-reflective prism, a quarter lambda wave plate, a probe, a polarization state detection device A, a polarization state detection device B and a computer, wherein the probe is composed of a single-mode optical fiber and a coupling ball, and the laser, the semi-transparent semi-reflective prism, the quarter lambda wave plate and the probe are arranged in sequence. Emergent light of the laser is reflected and transmitted by the semi-transparent semi-reflective prism, and reflected light enters the polarization state detection device A; transmission light enters the probe, reverse transmission of a transmission light beam is achieved after the transmitting light beam passes through the coupling ball, the transmission light exits from the probe, and emergent light passes through the quarter lambda wave plate again, is reflected by the semi-transparent semi-reflective prism again and then enters the polarization state detection device B. When the difference value between the polarization state detected by the polarization state detection device B and the polarization state detected by the polarization state detection device A is changed, it can be determined that the probe is in contact with a detected hole. The single-optical fiber coupling ball microscale sensor is high in precision and high in speed.

Description

technical field [0001] The invention belongs to precision instrument manufacturing and measurement technology, and mainly relates to a single optical fiber coupled ball microscale sensor based on polarization state detection. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitations of the space scale and the shadowing effect of the micro-components to be measured, as well as the influence of the measurement contact force, it is difficult to realize the precise measurement of the micro-component scale, especially the measurement of the depth of the micro-cavity components is difficult to increase, which has become a constraint to the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement depth, the most widely used met...

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Problems solved by technology

[0009] 1. It is difficult to further improve the touch displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve the resolution of the touch displacement.

The fiber grating probe based on FBG Bending's micropore size measurement method cannot apply the main micro-touch displacement effect to the fiber grating, and the sensing signal converted into spectral information is weak, and the resolution of the system is very low

[0010] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The detection method adopted by the National Institute of Standards and Technology must use two-way area array CCDs to receive signal images, and a more complex image algorithm must be used to achieve high-resolution monitoring of the displacement of the optical fiber measuring rod, which results in a large amount of data that the measurement system needs to process The amount is greatly increased, which reduces the real-time performance of the detection system, and it is difficult to realize the synchronization of the aiming signal and the start and stop measurement in the process of small cavity size and two-dimensional coordinate measurement

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