Ceramic thin film thermocouple and manufacture method thereof

A technology of ceramic thin film and thermocouple, which is applied in the direction of directly heat-sensitive electrical/magnetic element thermometers, measuring heat, and using electrical devices, etc., can solve the problems of high cost, low test temperature range, large error, etc., to achieve Low cost and wide temperature measurement range

Active Publication Date: 2014-07-02
DALIAN JIAOTONG UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the research on NiCr/NiSi thin film thermocouple has been relatively mature, but its test temperature range is low, and it is only suitable for medium and low temperature test occasions.
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  • Ceramic thin film thermocouple and manufacture method thereof
  • Ceramic thin film thermocouple and manufacture method thereof
  • Ceramic thin film thermocouple and manufacture method thereof

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Embodiment Construction

[0017] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings.

[0018] The invention is mainly improved from three aspects: 1. New thin-film thermocouple materials ITO (tin-doped indium oxide) and AZO (aluminum-doped zinc oxide) are used as the thermal electrode materials of the thermocouple; 2. The ceramic thin-film thermocouple 3. Improvement of the structure of the thermocouple film layer.

[0019] 1. Using a new type of ceramic film material, ITO (tin-doped indium oxide) ceramic material and AZO (aluminum-doped zinc oxide) ceramic material are used as the thermal electrode material of the thermocouple; ITO is an n-type semiconductor material with high conductivity. , high mechanical hardness and good chemical stability; AZO is obtained by doping Al in the ZnO system, AZO is also an n-type semiconductor material similar ...

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Abstract

The invention discloses a ceramic thin film thermocouple and a manufacture method thereof. The ceramic thin film thermocouple comprises a thermocouple conductive ceramic thin film comprising a ceramic thermode layer, wherein the ceramic thermode layer comprises a first thermode and a second thermode which are arranged in a mirror symmetry mode along the center line of the thermocouple conductive ceramic thin film. Both the first thermode and the second thermode comprise lap joint transverse ends for performing lap joint of a hot connection point between the thermodes, lead transverse ends connected with leads and transition vertical portions for enabling the lap joint transverse ends to be connected with the lead transverse ends. The lap joint transverse end of the first thermode and the lap joint transverse end of the second thermode are in lap joint partially to form the hot connection point of the thermocouple. Compared with the ordinary K-shaped thermocouple, the ceramic thin film thermocouple has the advantages of being wide in temperature measurement range and adaptive to oxidation and acid-base environments. Compared with other thermocouples made of high temperature resistant materials, such as platinum and rhodium, the ceramic thin film thermocouple is low in cost in the same temperature measurement range, and applicable to temperature measurement of extreme environments in the fields of space flight and aviation and the like.

Description

technical field [0001] The invention relates to a novel ceramic thin film thermocouple, belonging to the technical field of sensors, in particular to the technical field of temperature sensors. Background technique [0002] With the rapid development of aerospace industry, the application of transient temperature test technology is more extensive and in-depth, and the requirements are getting higher and higher. During the high-speed flight of some aircraft, the operating temperature of the leading edge of the wing, the nose cone, and the windward side of the fuselage all exceeds 1,000 degrees Celsius. For space vehicles, the temperature of the propulsion system components can reach over 1650°C. Therefore, the accurate measurement of the temperature of existing aviation components is of great significance to the design and maintenance of aviation components. [0003] Compared with traditional linear and block thermocouples, thin-film thermocouples have the outstanding advan...

Claims

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Application Information

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IPC IPC(8): G01K7/04
Inventor 崔云先安阳赵家慧郭立明
Owner DALIAN JIAOTONG UNIVERSITY
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