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72 results about "Ceramic thin films" patented technology

An all-aluminum energy-saving air compressor

The present invention proposes an all-aluminum energy-saving air compressor, which specifically relates to the technical field of air compressors and includes a cylinder head, a valve plate assembly fixedly provided at the bottom end of the cylinder head, a cylinder body fixedly provided at the bottom end of the valve plate assembly, a lubrication system provided inside the cylinder body, an oil pump portion fixedly provided at the end thereof, the lubrication system connected to the oil pump portion, the lubrication system connected to the crank-connecting rod structure, the crank-connecting rod structure slidably provided in the cylinder body; the cylinder head, valve plate assembly, cylinder body, lubrication system, oil pump portion, crank-connecting rod structure are all made of aluminum alloy material, and the inner cavity of the cylinder body is coated with a ceramic film. The all-aluminum energy-saving air compressor provided by the present invention can make the air compressor lightweight while also making the deformation consistency of the cylinder body of the air compressor. It adopts an all-aluminum cylinder body with a built-in oil pump function, has a simple structure and process, reduces fuel consumption, and achieves low pollution, energy saving and environmental protection requirements.
Owner:LONGKOU LONGJI THREE PUMPS CO LTD

High-wear-resistance additive forming titanium-based composite material and preparation method thereof

The invention discloses a high-wear-resistance additive forming titanium-based composite material and a preparation method thereof. The high-abrasion-resistance additive forming titanium-based composite material is mainly composed of a base body and an amorphous ceramic film, and the high-abrasion-resistance additive forming titanium-based composite material is prepared from, by mass, 97.0%-99.8% of the base body and 0.2%-3% of the amorphous ceramic film. By accurately controlling the thickness and the quality of the amorphous ceramic film, the number and the size of the reinforced phases can be regulated and controlled, and the fluidity and the oxidation resistance of the additive manufacturing titanium alloy powder can be remarkably improved through introduction of the amorphous ceramic film; the in-situ synthesis ceramic reinforced titanium-based composite material prepared through additive manufacturing is free of cracks, high in hardness, good in wear resistance and suitable for being used under harsh working conditions.
Owner:TIANMUSHAN LABORATORY

Iron-tin co-doped amorphous gallium oxide-based ferromagnetic ceramic film

The invention provides an iron-tin co-doped amorphous gallium oxide-based ferromagnetic ceramic film, and belongs to the technical field of magnetic semiconductor ceramic materials. The preparation method comprises the following steps: sufficiently mixing Ga, Fe and Sn organic precursor solutions according to a certain proportion to form a GaFeSn organic precursor solution; the cleaned single crystal aluminum oxide substrate is coated with the GaFeSn organic precursor solution in a spinning mode; then putting the obtained GaFeSn organic precursor film into a tube furnace with a single temperature zone; under the air atmosphere, the temperature of the tubular furnace is slowly increased to 550 DEG C at the speed of 5 DEG C / min, heat preservation is carried out for 1 h at the temperature of 550 DEG C, annealing treatment is carried out, and the amorphous GaFeSnO magnetic ceramic film which is uniform in thickness and has the amorphous phase and strong ferromagnetism is prepared. Strong ferromagnetism of the thin film is excited with low iron element doping concentration (10%), and the problem of low conductivity caused by transition metal doping in the magnetic ceramic thin film is solved. The amorphous GaFeSnO magnetic ceramic film prepared by the method has strong ferromagnetism of 170 emu / cm < 3 > under 2K and 90 emu / cm < 3 > under 300K, and the Curie temperature of 335K.
Owner:SICHUAN UNIV

A preparation method of dielectric energy storage capacitor and dielectric energy storage capacitor

The preparation method of the dielectric energy storage capacitor and the dielectric energy storage capacitor provided in this application are prepared by 3.25 La 0.75 TiO 12 Ceramic thin film precursor solution, preparation of Bi 3.25 La 0.75 TiO 12 Ceramic thin film, depositing metal electrodes onto the Bi 3.25 La 0.75 TiO 12 The dielectric energy storage capacitor is obtained on the ceramic film. The preparation method of the dielectric energy storage capacitor adopts a lead-free material system, which reduces the pollution to the environment and the harm to the human body, expands the application of the system in the field of energy storage, and has a simple process. And by regulating the annealing process, the Bi 3.25 La 0.75 TiO 12 The synergistic effect of the preferential orientation and interface engineering achieves reduced residual polarization while improving the breakdown field strength, resulting in excellent energy storage density and efficiency.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI

Polymer-derived ceramic thin film thermocouple and preparation method thereof

The present disclosure provides a polymer-derived ceramic thin film thermocouple and a preparation method thereof. The polymer-derived ceramic thin film thermocouple comprises an A electrode and a B electrode, wherein one end of the A electrode and one end of the B electrode intersect and overlap to form hot junctions, an end of the A electrode away from the hot junction and the end of the B electrode away from the hot junction are provided with solder joints. Each solder joint may be connected to a lead wire, the lead wire is configured for output a signal; the A electrode is prepared by mixing a polysilazane solution, nanocomposite powder and a xylene solution, and the nanocomposite is prepared by mixing indium oxide nanopowder, zinc oxide powder and anhydrous ethanol; the B electrode is prepared by mixing a polysilazane solution, indium oxide nanopowder, and a xylene solution.
Owner:ZHONGBEI UNIV

Laminate and method for producing laminate

According to one embodiment of the present invention, there is provided a laminate comprising a first metal layer, a second metal layer provided so as to face the first metal layer, an insulating layer provided between the first metal layer and the second metal layer and formed of a material including a resin, and a ceramic film provided between the insulating layer and the second metal layer.
Owner:DENKA CO LTD

Growth regulation and control method for cerium oxide-doped electrolyte ceramic film

PendingCN120535309APhysical chemistryCerium
The invention discloses a growth regulation and control method for a doped cerium oxide-based electrolyte ceramic film. According to the method, a hydrothermal in-situ growth technology is combined, and the pH value of the hydrothermal solution is effectively regulated and controlled by adding the pH regulator, so that decomposition of precursor salt is promoted, the growth rate of the ceramic film is remarkably increased and reaches-20 nm / h, and meanwhile, the element doping amount in the cerium oxide-based ceramic film is remarkably increased.
Owner:NANJING UNIV OF SCI & TECH

Forming nanotwinned regions in a ceramic coating at a tunable volume fraction

In a general aspect, a ceramic thin film with nanotwinned regions at a tunable volume fraction is manufactured. In some aspects, a method for manufacturing a ceramic thin film on a surface of a substrate in an evacuated chamber is disclosed. The ceramic thin film includes crystalline grains; and each of the crystalline grains includes one or more nanotwinned regions. The one or more nanotwinned regions have a volume fraction in a range of 30-80% of the ceramic thin film. The ceramic thin film comprises titanium, nitrogen, and boron. A plurality of targets including a plurality of sputtering materials is prepared. A gas atmosphere in the evacuated chamber is formed. Electric power is supplied to the plurality of targets to cause co-sputtering of the plurality of sputtering materials to form the ceramic thin film with the one or more nanotwinned regions.
Owner:UNIV OF SCI & TECH BEIJING

Film deposition apparatus and method for manufacturing ceramic films

To provide a film deposition apparatus capable of enhancing an adhesion efficiency of ceramic raw material powder.SOLUTION: A film deposition apparatus includes an aerosol generator 6, a nozzle 10, transfer gas supply means 15 having a transfer gas supply tube S2, accelerated gas supply means 20 having an accelerated gas supply tube S3, and heating means 23. The transfer gas supply tube S2 is connected to the nozzle 10 such that an ejection edge thereof is located in the nozzle 10 and a flow line of transfer gas ejected from the ejection edge has a linear shape up to the ejection edge of the nozzle 10. The accelerated gas supply tube S3 is connected to the nozzle 10 such that an ejection edge thereof is located in the vicinity of the ejection edge of the transfer gas supply tube S2 in the nozzle 10 and a flow line of accelerated gas ejected from the ejection edge collides the flow line of transfer gas.SELECTED DRAWING: Figure 1
Owner:OSAKA GAS CO LTD +1

A miniature high-precision ceramic thin film resistor-capacitor dual-function element and its manufacturing method

ActiveCN119835996BDielectricHemt circuits
The present invention discloses a miniature high-precision ceramic thin-film resistor-capacitor dual-function element and a manufacturing method thereof, relating to the technical field of integrated electronic components. The resistor-capacitor dual-function element uses magnetron vacuum sputtering technology to sequentially deposit a TaN film, a TiW film, and an Au film on a grain boundary layer dielectric ceramic substrate. The required TaN film is retained as a resistor film by etching, and the square resistance of the resistor film is precisely adjusted in combination with a heat treatment process to ultimately form a refined substrate with integrated resistors and capacitors. A single resistor-capacitor element is obtained through a scribing process, and precise adjustment of the electrostatic capacitance is achieved by controlling the thickness of the scribing blade. The single resistor-capacitor element has the characteristics of high-precision resistance and capacitance, miniaturization, low parasitic parameters, and high reliability, and can be widely used in microwave communications, radio frequency modules, and other high-performance electronic circuits. The invention solves the problem that existing resistors and capacitors are installed in circuits in discrete combinations, resulting in large circuit volume and many parasitic parameters.
Owner:GUANGDONG XINJU MICROELECTRONICS CO LTD

A method for manufacturing a high-temperature-resistant thin film temperature sensor based on laser manufacturing

ActiveCN120685214BThin membraneErbium lasers
The application discloses a high-temperature-resistant film temperature sensor preparation method based on laser manufacturing. First, a precursor film of a polymer precursor ceramic is coated on a substrate. After being heated to 180 DEG C or being naturally placed to solidify, the precursor film is scanned by a fiber laser in a certain mode, and the unnecessary part is removed, and the pattern part is left, so that the polymer precursor ceramic sensing film is simultaneously completed by patterning and pyrolysis. By using the technical scheme, the problems of a wide pattern, low preparation efficiency and high cost of the polymer precursor ceramic film are solved.
Owner:LINGNAN NORMAL UNIV

BZT laminated dielectric film with low loss and high tuning rate and preparation method thereof

The invention discloses a low-loss high-tunability BZT laminated dielectric film and a preparation method thereof, the laminated film comprises a substrate, a BZT film layer and a zinc niobate-based microwave dielectric ceramic film layer, and the chemical general formula of the zinc niobate film layer is Zn [(Ge0. 5Mo0. 5) xNb1-x] 2O6. A ceramic target material is synthesized by adopting a solid-phase reaction method, and thin film layers are sequentially deposited through a magnetron sputtering technology to construct a heterostructure. The high dielectric constant of BZT and the low loss characteristic of zinc niobate are combined, the frequency characteristic is remarkably improved, the dielectric loss is effectively reduced while the high tunability is kept, and the high-quality FOM is obtained and reaches 36.77. The film is excellent in performance and controllable in process, and has important application value in microwave communication devices such as tunable filters and phased array radars.
Owner:DONGGUAN UNIV OF TECH

Dual-wavelength femtosecond laser direct-writing miniaturized precursor ceramic high-temperature thin film sensor

The invention discloses a dual-wavelength femtosecond laser direct-writing miniaturized precursor ceramic high-temperature thin film sensor, and relates to the technical field of high-temperature thin film sensor manufacturing. Depositing the precursor functional slurry on the surface of a substrate layer by layer by adopting additive manufacturing processes such as blade coating, direct writing and the like, and performing pyrolysis to form an amorphous ceramic multilayer film; based on a dual-wavelength femtosecond laser micro-nano processing platform, the device comprises 1035nm / 343nm double light sources, a light path transmission system and a motion platform, and the characteristics of femtosecond laser ultrashort pulse and high peak power density are utilized to realize submicron precision graphical processing of a precursor ceramic film. And the area of the high-temperature film sensor unit is reduced from the square millimeter level of the traditional process to the square micron level. The method has the advantages of dual-wavelength laser collaborative processing, multi-layer film compatibility and the like, overcomes the disadvantages of large size and poor forming precision of a traditional additive manufacturing precursor ceramic film sensor, and provides a new normal form for integrated manufacturing of a micro sensor array serving in an extreme environment.
Owner:XIAMEN UNIV

Unilaterally densified large-size biomimetic ceramic janus membrane and preparation method thereof

ActiveCN117567047BCoatingsThin membraneAragonite
The application belongs to the field of material chemistry, and particularly relates to a kind of one-side densification large-size biomimetic ceramic Janus film and a preparation method thereof.The Janus film is a two-layer structure composed of a dense layer and a loose layer, the dense layer is aragonite crystal, and the loose layer contains aragonite and calcite crystals.The application induces crystal densification growth by limited effect, does not need the extreme environment of high temperature and high pressure in traditional densification ceramic firing, successfully prepares one-side densification mineral film under mild experimental conditions, saves energy, and provides favorable conditions for subsequent mechanism research and expansion of synthesis method.
Owner:UNIV OF SCI & TECH OF CHINA

Preparation method of high-temperature-resistant film temperature sensor based on laser manufacturing

The invention discloses a method for preparing a high-temperature-resistant film temperature sensor based on laser manufacturing, which comprises the following steps of: firstly, coating a precursor film of polymer precursor ceramic on a substrate, heating to 180 DEG C or naturally placing and curing, scanning the precursor film by adopting a fiber laser according to a certain mode, and removing unnecessary parts, so as to obtain the high-temperature-resistant film temperature sensor. The left pattern part is the polymer precursor ceramic sensing film with patterning and pyrolysis completed synchronously. By adopting the technical scheme provided by the invention, the problems of relatively wide pattern, low preparation efficiency and high cost of the current polymer precursor ceramic film are solved.
Owner:LINGNAN NORMAL UNIV

A high wear resistance additively formed titanium matrix composite and method of making same

The application discloses a high-wear-resistance additive forming titanium-based composite material and a preparation method thereof. The high-wear-resistance additive forming titanium-based composite material is mainly composed of a matrix and an amorphous ceramic film, and the mass fraction of each component of the high-wear-resistance additive forming titanium-based composite material is as follows: the matrix is 97.0-99.8%, and the amorphous ceramic film is 0.2-3%. The application can realize the quantity and size regulation of the reinforcing phase by precisely controlling the thickness and mass of the amorphous ceramic film. The introduction of the amorphous ceramic film can significantly improve the flowability and oxidation resistance of the additive manufacturing titanium alloy powder. The in-situ self-grown ceramic reinforced titanium-based composite material prepared by additive manufacturing is crack-free, has high hardness and good wear resistance, and is suitable for use under harsh working conditions.
Owner:TIANMUSHAN LABORATORY

Method for improving energy storage performance of flexible ceramic film based on strain effect

The invention discloses a method for improving the energy storage performance of a flexible ceramic film based on a strain effect, and relates to the technical field of energy storage dielectric capacitors, and the method comprises the following steps: S1, preparing a precursor solution; s2, preparing a thin film; and S3, depositing a gold electrode. According to the method for improving the energy storage performance of the flexible ceramic thin film based on the strain effect, the effect of improving the energy storage density and efficiency is obvious, and the value of strain mismatch of the substrate and the ceramic thin film can be continuously adjusted.
Owner:KUNSHAN QINGYUAN ELECTRONIC TECHNOLOGY CO LTD

Rare earth-based electrolytic coloring method, electrolyte, and alloy product

ActiveUS20250333872A1AnodisationEthylenediamineElectrolytic agent
A rare earth-based electrolytic coloring method, electrolyte, and alloy product are provided, where the method includes: after an oxide film is formed on a workpiece subjected to anodic oxidation in the electrolyte, rapidly increasing a voltage, and by using a constant-voltage mode, breaking down, melting, sintering, and reforming the oxide film cyclically multiple times under conditions of high frequency, a high voltage, and instantaneous high temperature, to generate a ceramic film layer metallurgically bonded to a substrate. The oxide film has a greater thickness and lower reflectance, and an appearance as a matte black anode, and has good color consistency and no chromatic aberration. Components of the electrolyte include sodium silicate at a concentration of 5-70 g / L, sodium tungstate at a concentration of 1-18 g / L, disodium ethylenediamine tetraacetic acid at a concentration of 2-10 g / L, and rare earth salts at concentrations of 1-2 g / L.
Owner:SHENZHEN XIN MAO XIN IND CO LTD

Method for improving energy storage performance of self-supporting ceramic film based on strain effect

The invention discloses a method for improving the energy storage performance of a self-supporting ceramic film based on a strain effect, and relates to the technical field of energy storage dielectric capacitors, and the method comprises the following steps: S1, preparing a Sr3Al2O6 sacrificial layer; step S2, depositing SrRuO3 (SrRuO3); s3, sputtering a bottom electrode and a ferroelectric body; s4, dissolving the sacrificial layer and the acrylic resin adhesive; and S5, replacing the flexible substrate. According to the method for improving the energy storage performance of the self-supporting ceramic thin film based on the strain effect, the effect of improving the energy storage density and efficiency is obvious, and a replaceable substrate with a wider strain adjusting range can be configured for the ceramic thin film.
Owner:KUNSHAN QINGYUAN ELECTRONIC TECHNOLOGY CO LTD

A method for preparing high-entropy zirconate PVD ceramic thin films

This invention discloses a method for preparing high-entropy zirconate PVD ceramic films. The method involves first spray-granulating five rare earth oxides—nano-Sm₂O₃, nano-Eu₂O₃, nano-Tb₂O₃, nano-Dy₂O₃, nano-Lu₂O₃, and nano-ZrO₂—with zirconium oxide to obtain target raw material powder. After sieving, spherical powders with different particle size ratios are obtained. These powders are then used to fabricate target green bodies using cold isostatic pressing, followed by sintering. Finally, the high-entropy zirconate EB-PVD target is deposited onto a smooth and glossy PVD substrate using PVD technology to form a high-entropy zirconate PVD ceramic film. The high-entropy ceramic film prepared using PVD technology exhibits significantly improved high-temperature stability, capable of withstanding environments exceeding 1500℃, enhanced interfacial adhesion, and adaptability to repeated thermal cycling requirements.
Owner:HARBIN INST OF TECH

Ceramic film and manufacturing method thereof, emitter, and thermophotovoltaic power generation device

To provide a ceramic film for a TPV power generation device that has sufficient strength and can acquire a desirable radiation spectrum.SOLUTION: A ceramic film 20 including a pore formed on a substrate includes: a plurality of high-density regions 1 having a density that is larger than an average density of the whole ceramic film; and a plurality of low-density regions 2 having a density that is smaller than the average density of the whole ceramic film. The high-density regions 1 and the low-density regions 2 are stacked in layers. The ceramic film comprises a rare-earth element-containing oxide ceramic.SELECTED DRAWING: Figure 1
Owner:NEC CORP +1

Cylindrical front body ceramic thin film temperature sensor and preparation device and method thereof

The application discloses a cylindrical front body ceramic thin film temperature sensor and a preparation device and a preparation method thereof, and the temperature sensor comprises a cylindrical substrate, a ceramic thin film sensitive grid, a welding spot, a lead wire and a fixing part, the ceramic thin film sensitive grid and the welding spot are conformally laid on the cylindrical substrate through a curved surface weissenberg direct writing forming technology and are prepared through pyrolysis and ceramicization, the welding spot is arranged on the ceramic thin film sensitive grid, the lead wire is connected with the welding spot, and the fixing part is covered on the welding spot. The application can realize in-situ preparation of the ceramic thin film temperature sensor on a cylindrical substrate such as a bearing and a bolt, the sensor has the advantages of in-situ nondestructive detection, strong resistance to extreme environment and less influence on surface characteristics of a structure to be measured, and the preparation device and the method have the advantages of high cylindrical patterning efficiency and simple process, thereby providing a new idea for popularization of high-temperature thin film sensors to practical application.
Owner:XIAMEN UNIV

Processing apparatuses and methods of using

Provided herein are processing apparatuses for producing high-quality films of sintered ceramics. The instant disclosure sets forth equipment and processes for making high quality, rapidly processed ceramic electrolyte films. These processes include high-throughput continuous sintering of oxides for use as electrolyte films. In certain processes, the film is not in contact with any surface as it sinters (i.e., during the sintering phase).Set forth herein are processes for making and using bilayers comprising a green body layer on a metal layer and bilayers comprising a sintered oxide layer on a metal layer. Set forth herein are processes for rapidly sintering thin bilayers comprising a green body layer on a metal layer in order to produce bilayers comprising a sintered oxide layer on a metal layer.
Owner:QUANTUMSPACE BATTERY INC

Method for directly printing aluminum oxide ceramic film based on room-temperature liquid metal

The invention relates to the technical field of ceramic thin film preparation, and discloses a method for directly printing an aluminum oxide ceramic thin film based on room-temperature liquid metal, which comprises the following steps: introducing an aluminum metal simple substance into gallium-based liquid metal, then putting the mixed room-temperature soft metal into deionized water for activation, and putting the activated room-temperature soft metal into a room-temperature atmospheric environment to form an aluminum oxide thin film. The preparation process is simple, the reaction conditions are mild, the film forming rate is high and easy to control, and the method is environmentally friendly, the hardness of the prepared film is 7.93 HV, the bending strength is about 3.6 MPa, the machinability is high, and the method is suitable for application and popularization.
Owner:YUNNAN NORMAL UNIV

Wireless passive / temperature strain two-parameter sensing element based on precursor polymer ferroelectric composite ceramic film and preparation method of wireless passive / temperature strain two-parameter sensing element

The invention relates to the technical field of temperature detection and strain testing, and discloses a wireless passive / temperature strain two-parameter sensing element based on a precursor polymer ferroelectric composite ceramic film and a preparation method of the wireless passive / temperature strain two-parameter sensing element. The composite dielectric coating comprises a substrate, an insulating layer and a composite dielectric layer from bottom to top, and the composite dielectric layer is prepared by mixing a precursor ceramic polymer with ferroelectric ceramic powder through high-temperature pyrolysis; the temperature sensitive structure and the strain sensitive structure are both comb tooth structures and are matched with the internal inductor and the external inductor to form an independent LC resonant circuit, the dielectric constant or the polar plate distance is changed through the environment temperature and deformation, the LC resonant frequency is changed, the temperature and the strain are effectively measured, and the working state of a measured structural part can be visually reflected.
Owner:NORTHEASTERN UNIV FOSHAN GRADUATE SCHOOL OF INNOVATION

Polymer precursor ceramic membrane thermocouple and method of making same

The present application relates to a kind of polymer precursor ceramic film thermocouple and its manufacturing method, thermocouple includes A electrode and B electrode, it is made on electric insulating coating, then lead is connected with welding spot, to output electric signal, manufacturing method is as follows: polysilazane solution and indium tin oxide (tin content 10% mass fraction) nano powder are mixed according to certain proportion to prepare A electrode, polysilazane solution and indium tin oxide (tin content 5% mass fraction) nano powder are mixed according to certain proportion to prepare B electrode, after screen printing, thin film A electrode line, B electrode line is obtained in electric insulating coating, and after solidification, it is placed in tube furnace, with 1 ℃ / min heating rate to 450 ℃, keep warm 1 hour;Again with 2.5 ℃ / min heating rate to 1000 ℃, keep warm 1 hour;Finally with 2.5 ℃ / min cooling rate to room temperature, finally, platinum wire is connected to two electrodes with welding spot, to output electric signal.
Owner:XIAMEN UNIV

Rare earth-based electrolytic coloring method, electrolyte, and alloy product

ActiveUS12522938B2AnodisationEthylenediamineElectrolytic agent
A rare earth-based electrolytic coloring method, electrolyte, and alloy product are provided, where the method includes: after an oxide film is formed on a workpiece subjected to anodic oxidation in the electrolyte, rapidly increasing a voltage, and by using a constant-voltage mode, breaking down, melting, sintering, and reforming the oxide film cyclically multiple times under conditions of high frequency, a high voltage, and instantaneous high temperature, to generate a ceramic film layer metallurgically bonded to a substrate. The oxide film has a greater thickness and lower reflectance, and an appearance as a matte black anode, and has good color consistency and no chromatic aberration. Components of the electrolyte include sodium silicate at a concentration of 5-70 g / L, sodium tungstate at a concentration of 1-18 g / L, disodium ethylenediamine tetraacetic acid at a concentration of 2-10 g / L, and rare earth salts at concentrations of 1-2 g / L.
Owner:SHENZHEN XIN MAO XIN IND CO LTD

Ultrahigh-temperature ceramic thin film for improving conductivity through grafting modification and preparation method of ultrahigh-temperature ceramic thin film

PendingCN121085644AMorpholinePolymer thin films
The invention discloses an ultrahigh-temperature ceramic film with improved conductivity through grafting modification and a preparation method of the ultrahigh-temperature ceramic film, and relates to the technical field of ultrahigh-temperature ceramic preparation. The method comprises the following steps: stirring and dispersing a SiHfBCN ceramic precursor polymer, MWCNTs-COOH and triton X-100 in methylbenzene, then adding 2-benzyl-2-dimethylamino-4 '-morpholinyl phenylbutanone, and stirring and dissolving to prepare a mixed solution; spin-coating on the surface of a pretreated silicon wafer to prepare a polymer film; and carrying out ultraviolet irradiation, pyrolyzing and cooling to prepare the ultrahigh-temperature ceramic film with improved conductivity through grafting modification. The room temperature resistivity of the modified SiHfBCN ceramic thin film can be reduced by about 70% to the maximum, and the problem that an existing ceramic thin film is poor in conductivity is solved.
Owner:SDIC CERAMIC MATRIX COMPOSITES RES INST (XIAN) CO LTD