Sample cell for infrared detection of germanium tetrachloride and silicon tetrachloride

A technology of silicon tetrachloride and infrared detection, which is applied in the direction of measuring devices, sampling devices, and material analysis through optical means, can solve the problems of non-removable cleaning, sample measurement errors, and inconvenient observation of germanium lens corrosion, etc., to achieve sealing Good effect, improve accuracy, avoid contact effect

Inactive Publication Date: 2014-07-02
GRINM GUOJINGHUI NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 2. Long-term sampling causes the inner wall of the germanium lens to be corroded to varying degrees, but since the germanium lens is fixed on the quartz cell with epoxy resin glue and a steel ring, it

Method used

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  • Sample cell for infrared detection of germanium tetrachloride and silicon tetrachloride

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0021] Example 1

[0022] Connect the discharge port of the germanium tetrachloride system to be tested with the inlet 5 of the three-way ball valve of the sample pool (L=100mm), connect the outlet 9 of the three-way ball valve of the sample pool with the tail gas receiving bottle, and open the discharge 3 sequentially Through the ball valve rotating handle 11 and the feed three-way ball valve rotating handle 6, the germanium tetrachloride sample enters the three-way ball valve feed port 5 during the sampling process, and when there is liquid outflow from the three-way ball valve outlet 9 of the sample pool, the sequence is closed The rotating handle 6 of the feeding three-way ball valve and the rotating handle 11 of the outlet three-way ball valve. The sampling process is over.

[0023] The mid-infrared measurement results of germanium tetrachloride are as follows:

[0024] Wave number cm -1 (Impurities) Transmittance (%) 3610±2cm -1 (GeCl 3 OH) 97.5 2970~2925cm -1 (CH) 99 28...

Example Embodiment

[0026] Example 2:

[0027] Connect the system discharge port of the silicon tetrachloride to be tested with the sample pool (L=100mm) three-way ball valve inlet 5, the sample pool three-way ball valve outlet 9 is connected with the tail gas receiving bottle, and open the discharge 3 sequentially Through the ball valve rotating handle 11 and the feed three-way ball valve rotating handle 6, the silicon tetrachloride sample enters from the three-way ball valve feed port 5 during the sampling process, and when liquid flows out from the three-way ball valve outlet 9 of the sample pool, the sequence is closed The rotating handle 6 of the three-way ball valve for feeding and the rotating handle 11 of the three-way ball valve for outgassing. The sampling process is over.

[0028] The infrared measurement results of silicon tetrachloride samples are as follows:

[0029] Wave number cm -1 (Impurities) Transmittance (%) 3666cm -1 (SiCl 3 OH) 97.05 3100-3020cm -1 (CH aromat) No peak 297...

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Abstract

The invention discloses a sample cell for infrared detection of germanium tetrachloride and silicon tetrachloride. The sample cell comprises a columnar cell body, a feed pipe and a gas outlet pipe are arranged on the columnar cell body and connected with a feed three-way ball valve and a gas outlet three-way ball valve respectively, the feed three-way ball valve and the gas outlet three-way ball valve are communicated with each other through a stainless steel bend pipe, each mirror surface for infrared detection of germanium tetrachloride and silicon tetrachloride samples is a germanium lens, external threads are arranged outside two ends of the columnar cell body, grooves are arranged on two end faces of the columnar cell body, a rubber sealing ring for filling is placed in each groove, the germanium lens is placed on each rubber sealing ring, a polytetrafluoroethylene gasket is placed on each germanium lens, and the two ends of the columnar cell body are in thread fit with screw fasteners with internal threads respectively to fasten the germanium lenses. The sample cell has the advantages of high corrosion resistance, fine sealing performance, easiness in detaching and cleaning, simplicity and convenience in operation and applicability to infrared spectrogram detection of germanium tetrachloride and silicon tetrachloride production in the field of chemical industry.

Description

technical field [0001] The invention relates to a sample pool for infrared detection of germanium tetrachloride and silicon tetrachloride. Background technique [0002] At present, the infrared detection sample cell of germanium tetrachloride and silicon tetrachloride is composed of a quartz columnar cell body and a germanium lens. A feed pipe and a discharge pipe are connected to the quartz cell body. The feed pipe and discharge pipe are sealed by a simple removable F46 cover. The germanium lens is fixed by steel ring and epoxy resin casting, which is not easy to disassemble and clean. . [0003] By analyzing the above sample pools, the currently used sample pools have the following disadvantages: [0004] 1. The feed pipe and discharge pipe of the sample pool are sealed by a simple and removable F46 cover. During the sampling process, the sample is exposed to air, which easily causes pollution and affects product quality and measurement accuracy. [0005] 2. Long-term s...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/15G01N1/20
Inventor 袁琴武鑫萍莫杰刘福财
Owner GRINM GUOJINGHUI NEW MATERIALS CO LTD
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