A method for enhancing the oxidation resistance of copper foam at higher temperature
A technology of anti-oxidation ability and foam enhancement, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of low anti-oxidation ability, achieve high repeatability and improve the effect of anti-oxidation ability
Active Publication Date: 2017-04-19
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology
[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a method for enhancing the oxidation resistance of foamed copper at higher temperatures, which is used to solve the problem of the relatively low oxidation resistance of foamed copper in high temperature environments in the prior art. low problem
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[0031] 1) The copper foam is ultrasonically cleaned with carbon tetrachloride, acetone, alcohol, and deionized water in sequence, then dried, and placed in the center of the substrate holder in the quartz tube of the anaerobic reactor. Evacuate the air in the quartz tube with a vacuum pump and introduce Ar gas to normal pressure, then keep heating under the condition of 300 SCCM Ar flow.
[0032] 2) When the temperature at the center of the furnace body reaches 1000°C, adjust the Ar gas flow rate to 1000SCCM, and at the same time inject 200SCCM hydrogen H 2 , keep for 30 minutes.
[0033] 3) Adjust the hydrogen to 5 SCCM, feed 5 SCCM methane into the quartz tube as the carbon source gas, and keep the normal pressure (1 atm) in the quartz tube at the same time, and the reaction starts;
[0034] 4) Stop feeding methane and hydrogen after 10 minutes of reaction, continue feeding 1000 SCCM Ar gas, and take out the sample after the temperature in the furnace cools down slowly (at ...
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The present invention relates to a method for enhancing antioxidation capacity of foam copper at a high temperature. The method comprises: placing foam copper in an oxygen-free reactor, pump vacuum, introducing an inert gas, heating to make the foam copper achieve a certain reaction temperature, introducing a carbon-containing gas to the oxygen-free reactor, and carrying out a reaction for a certain time under a certain air pressure until the temperature in the furnace is reduced to a room temperature so as to obtain the foam copper, wherein a layer of a compact ultrathin carbon film is covered on the surface of the obtained foam copper, such that the antioxidation capacity of the foam copper at a high temperature is significantly increased compared with the antioxidation capacity of the untreated foam copper, and significant influence on other physical parameters of the foam copper can not be generated. The method has characteristics of high repeatability, simpleness and easy performing.
Description
technical field [0001] The invention belongs to the field of metal surface protection, and in particular relates to a method for enhancing the oxidation resistance of foamed copper at relatively high temperatures. Background technique [0002] Porous metal foam is a metal material with a certain amount, a certain size of pores, and a certain porosity in a metal matrix. It is a rapidly developing material in current material science. Porous metal materials have the characteristics of three-dimensional multi-layer three-dimensional structure, high permeability, and adjustable pore size, so they have the dual functions of functional materials and structural materials. Porous metal materials have functions such as damping, shock absorption, noise reduction, heat insulation, flame retardancy, filtration, air distribution, and electronic shielding, and are widely used in production and life. Copper foam is a kind of metal foam, which has the characteristics and functions shared b...
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IPC IPC(8): C23C16/26
Inventor 张燕辉于广辉陈志蓥王彬张浩然
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI