Cavity intelligent pressure control system and its pressure control method

Abstract

A cavity intelligent pressure control system comprises a cavity body, a nitrogen gas inletting pipeline, an exhaust pipeline, a pressure sensor, an intelligent adjusting valve and a control unit, wherein the cavity body is a technological process cavity chamber; the nitrogen gas inletting pipeline is connected with the cavity body through a first valve; one end of the exhaust pipeline is connected with the cavity body, and the other end of the exhaust pipeline is connected with an external exhaust valve; the pressure sensor is arranged at the end, close to the external exhaust valve, of the exhaust pipeline and is used for testing exhaust pressure of the external exhaust valve; the intelligent adjusting valve is arranged at the overpressure pipeline section which is between the cavity body and the pressure sensor of the exhaust pipeline; the control unit is used for receiving pressure detection signals from the pressure sensor, and controlling the opening degree of an intelligent pressure adjusting valve, so that the pressure of the cavity body of 760 Torr is obtained in a set time range. According to the cavity intelligent pressure control system and a pressure control method of the same, the pressure sensor is arranged at the position, close to the external exhaust valve, of the exhaust pipeline, and the intelligent pressure adjusting valve which is controlled by the control unit is arranged at the overpressure pipeline section of the exhaust pipeline, so that the cavity body forms a pressure closed loop control system, and quick and precise control of the cavity body pressure can be achieved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an intelligent cavity pressure control system and a pressure control method thereof. Background technique [0002] At present, in order to ensure product quality and prolong the service life of equipment, routine maintenance is usually required after the vacuum chamber completes a certain working cycle. When performing maintenance, it is necessary to break the vacuum to open the vacuum chamber; after completing the maintenance, it is necessary to close the vacuum chamber, open the pumping unit, and check the leakage rate of the equipment. [0003] When performing the leak rate check, the host computer software will automatically execute the process conditions of the leak rate check. After the process conditions are completed, the vacuum chamber is purged ten times, and then 5000 slm of nitrogen gas is introduced, and the valve of the overpressure pipeline is opened at the...

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Problems solved by technology

[0007] The present invention is aimed at the traditional leak rate inspection operation in the prior art, which manually adjusts the peripheral exhaust valve and then adjusts the peripheral exhaust pressure to maintain the leak rate inspection condition of the chamber 760Torr, which is not only cumbersome to operate, but also Due to the individual differences of people, there is a certain deviation in the adjustment of the exhaust valve, the accuracy is not enough, time-consuming and labor-intensive and other defects provide an intelligent cavity pressure control system

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