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Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne second harmonic method

A linear frequency modulation and laser heterodyne technology, which is applied in the field of optical measurement, can solve the problems of large error and single measurement result, and achieve the effect of satisfying measurement accuracy, improving operation speed and realizing large-scale thickness detection.

Inactive Publication Date: 2017-02-22
HEILONGJIANG UNIV
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  • Summary
  • Abstract
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the existing glass thickness measurement method can only obtain a single value of the parameter to be measured, resulting in a large error in the measurement result, and provides a linear frequency modulation multi-beam laser heterodyne second harmonic method Device and method for measuring glass thickness

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  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne second harmonic method
  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne second harmonic method
  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne second harmonic method

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specific Embodiment approach 1

[0043] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the device for measuring glass thickness by chirp multi-beam laser heterodyne second harmonic method described in this embodiment, it includes the plate glass 1 to be tested, is characterized in that, it also includes chirp laser 2, the first Plane mirror 3, second plane mirror 4, converging lens 5, photodetector 6 and signal processing system 7,

[0044] After the linearly polarized light emitted by the chirp laser 2 is reflected by the first plane mirror 3 and the second plane mirror 4, it is obliquely incident on the front surface of the flat glass 1 to be tested, and the light beam transmitted through the front surface of the flat glass 1 to be tested is After being reflected by the rear surface of the flat glass 1 to be tested, the light beam reflected by the front surface of the flat glass 1 to be tested is converged by the converging lens 5 onto the photosensitive surfa...

specific Embodiment approach 2

[0045] Specific implementation mode two: the following combination figure 1 Describe this embodiment, this embodiment will further illustrate embodiment one, the signal processing system 7 described in this embodiment consists of a filter 7-1, a preamplifier 7-2, an analog-to-digital converter 7-3 and a digital signal processor DSP7-4 composition,

[0046] The photoelectric detector 6 outputs an electrical signal to the filter 7-1 of the signal processing system 7, and after being filtered by the filter 7-1, it is sent to the preamplifier 7-2, and the preamplifier 7-2 amplifies the received signal and outputs an analog signal The signal is sent to the analog-to-digital converter 7-3, and the analog-to-digital converter 7-3 converts the analog signal into a digital signal and sends it to the digital signal processor DSP7-4, and the digital signal processor DSP7-4 processes the received digital signal , to obtain the thickness d of the flat glass 1 to be measured.

[0047] In ...

specific Embodiment approach 3

[0048] Specific implementation mode three: the following combination figure 1 and figure 2Describe this embodiment, this embodiment is to adopt the above-mentioned device for measuring glass thickness by the chirp multi-beam laser heterodyne second harmonic method to realize the method for measuring glass thickness by the chirp multi-beam laser heterodyne second harmonic method, the method The process is:

[0049] First, turn on the chirp laser 2 to make it emit linearly polarized light, and make the photodetector 6 start to receive the beam signal, and the digital signal processor DSP7-4 continuously collects the electrical signal output by the photodetector 6, and analyzes the collected difference Frequency signal processing, according to the relationship between frequency and thickness:

[0050] f=Kd,

[0051] Obtain the thickness d of the flat glass 1 to be tested:

[0052] d=f / K,

[0053] In the formula, f is the frequency of the heterodyne signal, and K is the prop...

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Abstract

The invention discloses a linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method and belongs to the technical field of optical measurement. The linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method aims at solving the problem that the measuring result is large in error due to the fact that only single to-be-measured parameter values are obtained through the existing glass thickness measuring method. The linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device comprises to-be-measured sheet glass, a linear frequency modulation laser, a first planar mirror, a second planar mirror, a convergent lens, a photoelectric detector and a signal processing system. The linear frequency modulation multi-beam laser heterodyne second harmonic method glass thickness measuring method comprises opening the linear frequency modulation laser, enabling the linear frequency modulation laser to emit linearly polarized light, enabling the photoelectric detector to receive light beam signals and a DSP (Digital Signal Processor) to continuously collect electric signals output from the photoelectric detector and process collected difference frequency signals and obtaining the thickness of the to-be-measured sheet glass according to the relationship between the frequency and the thickness. The linear frequency modulation multi-beam laser heterodyne second harmonic method based glass thickness measuring device and method is used for measuring the glass thickness.

Description

technical field [0001] The invention relates to a device and a method for measuring glass thickness by a linear frequency modulation multi-beam laser heterodyne second harmonic method, and belongs to the technical field of optical measurement. Background technique [0002] Precision glass thickness measurement is a problem that the engineering field has been facing and trying to solve. With the development of science and technology, thickness measurement methods are constantly being introduced, including optical measurement, interferometry and diffraction. However, the measurement accuracy of these methods is limited, and it is difficult to meet the needs of high-precision thickness measurement. [0003] Optical thickness measurement has attracted people's attention because of its non-contact, high precision and simple structure, and the use of optical methods for thickness measurement has been more and more widely used. Among optical measurement methods, laser heterodyne ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
Inventor 李彦超杨九如冉玲苓高扬柳春郁杨瑞海杜军丁群王春晖马立峰于伟波
Owner HEILONGJIANG UNIV
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