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Device and method for identifying laser damages to optical film

A technology of optical thin films and identification devices, which is applied in measuring devices, scientific instruments, and material analysis through electromagnetic means, etc., can solve problems such as plasma flash and atmospheric breakdown, and achieve high discrimination accuracy, fast discrimination speed, and small interference Effect

Active Publication Date: 2014-07-30
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

However, when the intensity of the laser is high enough, the atmosphere also breaks down and a plasma flash occurs
When a strong laser acts on the surface of a thin film and a plasma flash occurs, in most cases, the compound plasma of the thin film and the atmosphere is obtained, or only the atmospheric plasma flash is obtained. Therefore, the method of detecting light intensity is used to detect It is inevitable to judge whether the film is damaged or not, resulting in "misjudgment" in the actual test

Method used

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  • Device and method for identifying laser damages to optical film
  • Device and method for identifying laser damages to optical film
  • Device and method for identifying laser damages to optical film

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Embodiment Construction

[0026] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0027] see figure 1 The identification device for laser damage to optical thin films of the present invention includes a laser 1 and a test sample 2. The laser 1 is a high-energy laser that can damage the film on the surface of the test sample 2, and the wavelength of the laser is 1064nm, the pulse width is 10ns, and the maximum single pulse The energy is 400mJ; the test sample 2 is installed on the test sample table 9, which is a two-dimensional mobile platform controlled by a stepping motor; the laser 1 is facing the surface to be tested of the test sample 2, and one side of the test sample table 9 An accelerating electrode 4 for accelerating the particles sputtered out of the sample by laser irradiation and forming a collimated particle beam is provided, and an electron source 3 for increasing the ion content is also provided between the test sample stage 9 and the...

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Abstract

The invention discloses a method and a device for identifying laser damages to an optical film. The types of elements contained in damaged materials can be determined by acquiring mass-to-charge ratio distribution and performing mass spectrometric analysis and element judgment through computer software, so that damages to the film can be judged accurately and rapidly on line. The device adopting the method consists of a test sample stage, a mass-to-charge ratio acquisition system and a computer operation system. By adopting the method and the device, the damage state of the film or an optical element under strong laser light can be judged rapidly and accurately on line in real time. By applying the method to laser damage threshold test, integration, automation and intelligence of a test system can be realized.

Description

technical field [0001] The invention belongs to the technical field of optical thin film detection, relates to a method for judging optical thin film damage, in particular to a recognition device and method for laser damage to optical thin film. Background technique [0002] In high-energy laser systems, there are various optical components and thin-film devices. The anti-laser damage performance of these components is inseparable from the normal and effective operation of the optical system. Laser damage threshold (LIDT) is an important index to measure the performance of thin films and optical components, but there are still many problems in the current test of laser damage threshold. In the process of laser damage threshold testing, how to accurately, real-time, fast and online judge film damage has become the core part of the research. Therefore, in order to obtain the laser damage threshold of the thin film, the first condition is to make a fast and accurate judgment o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64
Inventor 苏俊宏徐均琪惠迎雪梁海锋杨利红李建超
Owner XIAN TECHNOLOGICAL UNIV
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