A new device for on-machine inspection of aspheric optical molds
A technology of aspheric surfaces and new devices, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problems of low measurement accuracy, low measurement efficiency, and unsatisfactory measurement accuracy, and achieve strong noise and anti-machine vibration capabilities Effect
Active Publication Date: 2017-07-07
ZHEJIANG UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Problems solved by technology
However, the current research is limited to the off-machine measurement of aspheric surfaces by using the shear interferometer, and there are still the following problems in using it for on-machine measurement of aspheric molds: 1. The measurement accuracy is low, so when it is used for on-machine measurement More error factors need to be considered, such as the vibration of the machine tool itself, the instability of the air pressure, the vibration caused by the oil circuit of the machine tool, the vibration of the foundation, etc., and its measurement accuracy cannot meet the requirements of mold processing; 2. The current shear interference technology measurement Low efficiency, that is, it is impossible to detect aspheric molds with different calibers, different surface shapes, and different aspheric degrees on the machine; 3. At present, the shear interference is mainly transverse shear, but the interference diagram obtained by transverse shear cannot reflect To recover all the surface shapes of the mold under test, two sets of interferograms that are orthogonal to each other need to be collected successively, which will greatly affect the efficiency of on-machine measurement
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[0019] See figure 1 , the new device 100 of the present invention for on-machine measurement of the aspheric optical mold surface shape includes a laser 1, and an optical beam expander system 2, a beam splitter 3, a focus conversion lens 4, and a laser beam are arranged in sequence along the horizontal direction of advance of the laser light generated by the laser 1. Measure the aspheric mold 5; the laser is reflected by the beam splitter 3 again to form the first vertical optical path, and the first optical flat plate 6 is placed on the vertical optical path, and the laser passes through the first optical flat plate 6 to form two horizontal optical paths. In a, the first optical wedge 7 and the second optical wedge 8 are arranged in sequence along the laser advancing direction; in the upper optical path b, the third optical wedge 9 and the fourth optical wedge 10 are successively placed along the laser advancing direction; between the optical wedge 8 and the optical wedge Pla...
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A new device for on-machine inspection of aspheric optical molds, which includes: a laser, two beam expanders, a beam shrinker, a beam splitter, a conversion lens, two optical flat plates, four wedge angles A small circular wedge, a high-bandwidth acousto-optic deflector, two spatial filters, two mirrors, an RF power amplifier, a direct digital frequency synthesizer, a CCD, and a computer. In this device, both direct digital frequency synthesizer and CCD are connected with computer and controlled by computer. The present invention adjusts the frequency control word of the direct digital frequency synthesizer through the computer program to make the interference fringe high-speed frequency conversion, and uses the multi-frequency time series phase unwrapping method to process the fringe image; the frequency conversion speed of the fringe reaches tens of nanoseconds / frame, so it can On-machine detection of the surface shape of the aspheric optical mold is realized.
Description
[0001] 【Technical field】 [0002] The invention is a three-dimensional measurement device based on optical interference technology, in particular relates to a new device for on-machine detection of aspheric optical molds. [0003] 【Background technique】 [0004] At present, all kinds of lenses have been developed in the direction of short, small, light, thin and high image quality, and the use of aspherical lenses has become the leading force to promote the development of this trend. The batch manufacturing of plastic aspheric lenses (diameter below 100mm) mainly adopts precision injection molding technology, while the batch manufacturing of glass aspheric lenses (diameter below 50mm) mainly adopts thermal molding technology. The manufacture of these two types of aspheric lenses are both Rely on the processing of ultra-precision molds, and the processing accuracy and efficiency of molds are a technical bottleneck restricting the production of aspheric lenses. How to improve th...
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IPC IPC(8): G01B11/24
Inventor 朱勇建曹胜范玉峰潘卫清
Owner ZHEJIANG UNIVERSITY OF SCIENCE AND TECHNOLOGY