SIMS measuring method for oxygen isotopes in semiconductor or conductor nuclear materials
A technology of oxygen isotopes and measurement methods, applied in the field of nuclear materials, can solve the problems of complex chemical processing and measurement processes, large sample consumption, etc.
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[0044] The above and other technical features and advantages of the present invention will be described in more detail below in conjunction with the accompanying drawings.
[0045] The present invention proposes a method for quickly and accurately measuring oxygen isotopes in uranium oxides from sample processing, sample preparation, optical path adjustment, measurement condition optimization, data collection parameter setting to final result calculation.
[0046] see figure 1Shown, it is the flow chart of the SIMS measuring method of oxygen isotope in the nuclear material in the present invention, and the required sample of the present invention is the metal uranium of depth oxidation, adopts SIMS mass spectrometer to measure, and this specific process is:
[0047] Step a1, sample processing: flatten the surface of the metal uranium sample to ensure a smooth surface, and store it in a desiccator filled with Ar until use.
[0048] Step a2, preparation for cleaning; before sam...
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